A New Approach to 3-D Profilometry for the White Light Interferometric (WLI)
Summary :
A new approach to 3-D profilometry for the white light interferometric (WLI) is presented. The proposed method is the extended depth from focus (EDFF) that determine the zero optical path difference (OPD) from the quantity of fringe contrast degradation of white light interferometer. In the method, the variance of the mismatch function and the modified local variance function are used as the focus measures. The method has a theoretically unlimited range and can profile with subpixel accuracy both optically rough and smooth surfaces without changing algorithm.
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- IEICE TRANSACTIONS on Fundamentals Vol.E84-A No.1 pp.378-382
- Publication Date
- 2001/01/01
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Seok-Moon RYOO, Tae-Sun CHOI, "A New Approach to 3-D Profilometry for the White Light Interferometric (WLI)" in IEICE TRANSACTIONS on Fundamentals,
vol. E84-A, no. 1, pp. 378-382, January 2001, doi: .
Abstract: A new approach to 3-D profilometry for the white light interferometric (WLI) is presented. The proposed method is the extended depth from focus (EDFF) that determine the zero optical path difference (OPD) from the quantity of fringe contrast degradation of white light interferometer. In the method, the variance of the mismatch function and the modified local variance function are used as the focus measures. The method has a theoretically unlimited range and can profile with subpixel accuracy both optically rough and smooth surfaces without changing algorithm.
URL: https://global.ieice.org/en_transactions/fundamentals/10.1587/e84-a_1_378/_p
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@ARTICLE{e84-a_1_378,
author={Seok-Moon RYOO, Tae-Sun CHOI, },
journal={IEICE TRANSACTIONS on Fundamentals},
title={A New Approach to 3-D Profilometry for the White Light Interferometric (WLI)},
year={2001},
volume={E84-A},
number={1},
pages={378-382},
abstract={A new approach to 3-D profilometry for the white light interferometric (WLI) is presented. The proposed method is the extended depth from focus (EDFF) that determine the zero optical path difference (OPD) from the quantity of fringe contrast degradation of white light interferometer. In the method, the variance of the mismatch function and the modified local variance function are used as the focus measures. The method has a theoretically unlimited range and can profile with subpixel accuracy both optically rough and smooth surfaces without changing algorithm.},
keywords={},
doi={},
ISSN={},
month={January},}
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TY - JOUR
TI - A New Approach to 3-D Profilometry for the White Light Interferometric (WLI)
T2 - IEICE TRANSACTIONS on Fundamentals
SP - 378
EP - 382
AU - Seok-Moon RYOO
AU - Tae-Sun CHOI
PY - 2001
DO -
JO - IEICE TRANSACTIONS on Fundamentals
SN -
VL - E84-A
IS - 1
JA - IEICE TRANSACTIONS on Fundamentals
Y1 - January 2001
AB - A new approach to 3-D profilometry for the white light interferometric (WLI) is presented. The proposed method is the extended depth from focus (EDFF) that determine the zero optical path difference (OPD) from the quantity of fringe contrast degradation of white light interferometer. In the method, the variance of the mismatch function and the modified local variance function are used as the focus measures. The method has a theoretically unlimited range and can profile with subpixel accuracy both optically rough and smooth surfaces without changing algorithm.
ER -
English
