A new approach to 3-D profilometry for the white light interferometric (WLI) is presented. The proposed method is the extended depth from focus (EDFF) that determine the zero optical path difference (OPD) from the quantity of fringe contrast degradation of white light interferometer. In the method, the variance of the mismatch function and the modified local variance function are used as the focus measures. The method has a theoretically unlimited range and can profile with subpixel accuracy both optically rough and smooth surfaces without changing algorithm.

In this letter we propose a new Shape from Focus (SFF) method using piecewise curved search windows for accurate 3-D shape recovery. The new method uses piecewise curved windows to compute focus measure and to search for Focus Image Surface (FIS) in image space. The experimental result shows that our new method gives more accurate result than the previous SFF methods.