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[Author] Shin-ichiro AOSHIMA(1hit)

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  • Highly Sensitive Real Time Electro-Optic Probing for Long Logic Pattern Analysis

    Hironori TAKAHASHI  Shin-ichiro AOSHIMA  Kazuhiko WAKAMORI  Isuke HIRANO  Yutaka TSUCHIYA  

     
    PAPER

      Vol:
    E78-C No:1
      Page(s):
    67-72

    While Electro-Optic (E-O) sampling has achived the electric signal measurement with advantages of noninvasive, noncontact and ultrafast time resolution, it is unsuitable for measuring long logic patterns in fast ICs under the functional test conditions. To overcome this problem, a real time E-O probing using a continuous wave (CW) diode laser and a fast photodetector has been developed. By adopting a ZnTe E-O probe having a half-wave voltage of 3.6 kV, shot noise limited measurement with a frequency bandwidth of 480 MHz has been achieved using a low noise diode laser (wavelength of 780 nm, output power of 30 mW), a pin photodiode, a wideband low noise amplifier, and a digital oscilloscope having 500 MHz bandwidth as a waveform analyzer. The minimum detectable voltage was 23 mV under 700 times integration. In this paper, discussion of the voltage sensitivity of real time E-O probing is included. Key parameters for attaining the highly sensitive real time E-O probing are the sensitivity of the E-O probe and noises of the probing light and detection system.