This paper describes the development of superconductor-insulator-superconductor (SIS) mixers for the Atacama Large Millimeter/submillimeter Array (ALMA) from the device point of view. During the construction phase of ALMA, the National Astronomical Observatory of Japan (NAOJ) successfully fabricated SIS mixers to meet the stringent ALMA noise temperature requirements of less than 230 K (5 times the quantum noise) for Band 10 (787-950 GHz) in collaboration with the National Institute of Information and Communications Technology. Band 10 covers the highest frequency band of ALMA and is recognized as the most difficult band in terms of superconducting technology. After the construction, the NAOJ began development studies for ALMA enhancement such as wideband and multibeam SIS mixers according to top-level science requirements, which are also presented.

Three-dimensionally assembled TES X-ray microcalorimeter arrays may be utilized for three purposes: (1) to obtain wide X-ray energy coverage of TES microcalorimeters, (2) to distinguish charged particle events from X-ray events, (3) to reconstruct Compton-scattering geometry for hard X-ray Compton cameras. We have designed and fabricated three-dimensionally assembled array of the minimum format i.e. $2 imes 2 imes 2$ array in order to obtain a good energy resolution in a wide energy range of 0.5--20,keV and a high maximum counting rate of 2000,cps for energy dispersive X-ray spectrometer (EDS) system for a transmission electron microscope (TEM). Although we could not obtain required energy resolution because of a problem in the refrigerator system, we confirmed the operation of the three-dimensional array.