Elemental technologies have been studied to establish the healthcare chip which is an intelligent micro analytical system to detect human health markers from a trail of blood. A two steps process for deep quartz dry-etching was discussed in order to overcome the issues of concave-shaped defects at the bottom of grooves. A coating with 2-methacryloyloxyethylphosphorylcholine (MPC) polymer was studied to suppress the adsorption of bio-substance onto the inner wall of the flow channel on chip and good bio-compatibility was achieved for suppression of protein adsorption and blood cell adhesion. A prototype of healthcare chip was fabricated on polyethylene terephthalate (PET) plate using a micro molding technique. Using this chip, the ion concentrations of pH, Na+, K+, Ca++ were successfully measured with embedded ion sensitive field effect transistors (ISFET's).