A tunable optical Fabry-Perrot filter was designed by setting a single-mode optical fiber normal to the diaphragm of a capacitive pressure sensor. The silicon diaphragm is deflected by the electrostatic force generated by applying a voltage to the capacitive electrodes. According to the movement of the diaphragm, the peak wavelength changed from 1546 to 1551 nm when applied voltage was increased from 20 to 50 V. The relationship of the wavelength change to the applied voltage was derived from the silicon diaphragm deflection theory. That measured change of the wavelength agrees well with the wavelength change calculated from this relationship. The commercial pressure sensors are expected to be able to be used as a tunable optical filter.

We developed a glass ferrule fiber optic connector. During development, we also studied wear-resistant coating technology for preventing scratches on the surface of a glass ferrule. The method of coating was sputtering, and the material was alumina. We confirmed that a thin uniform coating could be formed on the ferrule surface to improve the durability of glass ferrule connectors.