Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor

Kenichiro SUZUKI; Takefumi OGUMA; Tetsuji UEDA; Takashi SHIBUYA

Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor

Kenichiro SUZUKI, Takefumi OGUMA, Tetsuji UEDA, Takashi SHIBUYA

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A tunable optical Fabry-Perrot filter was designed by setting a single-mode optical fiber normal to the diaphragm of a capacitive pressure sensor. The silicon diaphragm is deflected by the electrostatic force generated by applying a voltage to the capacitive electrodes. According to the movement of the diaphragm, the peak wavelength changed from 1546 to 1551 nm when applied voltage was increased from 20 to 50 V. The relationship of the wavelength change to the applied voltage was derived from the silicon diaphragm deflection theory. That measured change of the wavelength agrees well with the wavelength change calculated from this relationship. The commercial pressure sensors are expected to be able to be used as a tunable optical filter.

Publication: IEICE TRANSACTIONS on Electronics Vol.E83-C No.9 pp.1435-1440

Publication Date: 2000/09/25

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Type of Manuscript: Special Section PAPER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)

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Kenichiro SUZUKI, Takefumi OGUMA, Tetsuji UEDA, Takashi SHIBUYA, "Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor" in IEICE TRANSACTIONS on Electronics, vol. E83-C, no. 9, pp. 1435-1440, September 2000, doi: .
Abstract: A tunable optical Fabry-Perrot filter was designed by setting a single-mode optical fiber normal to the diaphragm of a capacitive pressure sensor. The silicon diaphragm is deflected by the electrostatic force generated by applying a voltage to the capacitive electrodes. According to the movement of the diaphragm, the peak wavelength changed from 1546 to 1551 nm when applied voltage was increased from 20 to 50 V. The relationship of the wavelength change to the applied voltage was derived from the silicon diaphragm deflection theory. That measured change of the wavelength agrees well with the wavelength change calculated from this relationship. The commercial pressure sensors are expected to be able to be used as a tunable optical filter.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e83-c_9_1435/_p

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@ARTICLE{e83-c_9_1435,
author={Kenichiro SUZUKI, Takefumi OGUMA, Tetsuji UEDA, Takashi SHIBUYA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor},
year={2000},
volume={E83-C},
number={9},
pages={1435-1440},
abstract={A tunable optical Fabry-Perrot filter was designed by setting a single-mode optical fiber normal to the diaphragm of a capacitive pressure sensor. The silicon diaphragm is deflected by the electrostatic force generated by applying a voltage to the capacitive electrodes. According to the movement of the diaphragm, the peak wavelength changed from 1546 to 1551 nm when applied voltage was increased from 20 to 50 V. The relationship of the wavelength change to the applied voltage was derived from the silicon diaphragm deflection theory. That measured change of the wavelength agrees well with the wavelength change calculated from this relationship. The commercial pressure sensors are expected to be able to be used as a tunable optical filter.},
keywords={},
doi={},
ISSN={},
month={September},}

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TY - JOUR
TI - Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor
T2 - IEICE TRANSACTIONS on Electronics
SP - 1435
EP - 1440
AU - Kenichiro SUZUKI
AU - Takefumi OGUMA
AU - Tetsuji UEDA
AU - Takashi SHIBUYA
PY - 2000
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E83-C
IS - 9
JA - IEICE TRANSACTIONS on Electronics
Y1 - September 2000
AB - A tunable optical Fabry-Perrot filter was designed by setting a single-mode optical fiber normal to the diaphragm of a capacitive pressure sensor. The silicon diaphragm is deflected by the electrostatic force generated by applying a voltage to the capacitive electrodes. According to the movement of the diaphragm, the peak wavelength changed from 1546 to 1551 nm when applied voltage was increased from 20 to 50 V. The relationship of the wavelength change to the applied voltage was derived from the silicon diaphragm deflection theory. That measured change of the wavelength agrees well with the wavelength change calculated from this relationship. The commercial pressure sensors are expected to be able to be used as a tunable optical filter.
ER -