A low voltage stochastic flash ADC (analog-to-digital converter) is presented, with an inverter-based comparative unit which is used to replace comparator for comparison. Aiming at the low voltage and low power consumption, a key of our design is in the simplicity of the structure. The inverter-based comparative unit replacing a comparator enables us to decrease the number of transistors for area saving and power reduction. We insert the inverter-chain in front of the comparative unit for the signal stability and discuss an appropriate circuit structure for the resolution by analyzing three different ones. Finally, we design the whole stochastic flash ADC for verifying our idea, where the supply voltage can go down to 0.6V on the 65nm CMOS process, and through post-layout simulation result, we can observe its advantage visually in voltage, area and power consumption.