Self-ordered mesoporous silicate films from organic-inorganic compound materials are successfully fabricated into the surface photo voltage (SPV) type gas sensor device as a gas adsorption insulator layer. These kinds of gas sensors device exhibit NO gas sensing property dependent on their mesoporous film structure. We are succeeded in indication about a possibility of mesoporous silicate film for the SPV type gas sensor application.

The mesoporous materials from the self-assembled organic-inorganic compound materials have great possibilities for a variety of applications. However, to make use of these kinds of materials effectively, they must be controlled. In this paper, we are succeeded in powder state pore size control and in significantly fabrication film state for device application use.