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An Application Possibility of Self-Ordered Mesoporous Silicate for Surface Photo Voltage (SPV) Type NO Gas Sensor (II): Self-Ordered Mesoporous Silicate Incorporated SPV Device and Its Sensing Property Dependence on Mesostructure

Takeo YAMADA, Hao-Shen ZHOU, Hidekazu UCHIDA, Masato TOMITA, Yuko UENO, Keisuke ASAI, Itaru HONMA, Teruaki KATSUBE

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Summary :

Self-ordered mesoporous silicate films from organic-inorganic compound materials are successfully fabricated into the surface photo voltage (SPV) type gas sensor device as a gas adsorption insulator layer. These kinds of gas sensors device exhibit NO gas sensing property dependent on their mesoporous film structure. We are succeeded in indication about a possibility of mesoporous silicate film for the SPV type gas sensor application.

Publication
IEICE TRANSACTIONS on Electronics Vol.E85-C No.6 pp.1304-1310
Publication Date
2002/06/01
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section PAPER (Special Issue on Recent Progress in Organic Molecular Electronics)
Category
Sensors

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