To immobilize cytochrome $c$ (cyt.,$c$) on ITO electrode with keeping its direct electron transfer (DET) activity, 10-carboxydecylphosphonic acid (10-CDPA) self-assembled monolayer (SAM) film was formed on ITO electrode. After 100 times washing process with exchanging phosphate buffer saline solution in the cell to fresh one, extit{in situ} slab optical waveguide (SOWG) absorption spectral measurement proved that about 80% of cyt.,$c$ immobilized on 10-CDPA modified ITO electrode was adsorbed on ITO electrode. Additionally SOWG spectral change of cyt.,$c$ between oxidized and reduced forms was observed with setting the ITO electrode potential at 0.3 and $-$0.3,V vs. Ag/AgCl, respectively showing DET reaction between cyt.,$c$ and ITO electrode occurred. About 30% of a monolayer coverage was estimated from the coulomb amount in the surface area of oxidation and reduction peaks on cyclic voltammetry (CV) data. CV peak current maintained 84% for ITO electrode modified with 10-CDPA SAM film after 60,min continuous scan with 0.1,V/sec from 0.3 and $-$0.3,V vs. Ag/AgCl.