The FePt films were fabricated by using RF sputtering for magnetic recording media. The efforts have been done to reduce the grain size, to decrease the ordering temperature, and to control the crystalline orientation. It was found that the proper amount of alumina led to decrease the grain size and weak the interparticle exchange coupling. 15% N2 partial pressure can reduce the transform temperature from fcc to fct phase. In order to control the texture in the FePt films, two kinds of methods were used. On the one hand, the addition of W in Cr underlayer and the usage of Mo and Pt as intermediate layer caused the texture of FePt films changed from (200) to (001). On the other hand, the (Pt/Fe)n multilayers were fabricated to produce the FePt (001) orientation.