This paper presents a simulation study on the printing behavior of three different EUV resist systems. Stochastic models for negative metal-based resist and conventional chemically amplified resist (CAR) were calibrated and then validated. As for negative-tone development (NTD) CAR, we commenced from a positive-tone development (PTD) CAR calibrated (material) and NTD development models, since state-of-the-art measurements are not available. A conceptual study between PTD CAR and NTD CAR shows that the stochastic inhibitor fluctuation differs for PTD CAR: the inhibitor level exhibits small fluctuation (Mack development). For NTD CAR, the inhibitor fluctuation depends on the NTD type, which is defined by categorizing the difference between the NTD and PTD development thresholds. Respective NTD types have different inhibitor concentration level. Moreover, contact hole printing between negative metal-based and NTD CAR was compared to clarify the stochastic process window (PW) for tone reversed mask. For latter comparison, the aerial image (AI) and secondary electron effect are comparable. Finally, the local CD uniformity (LCDU) for the same 20 nm size, 40 nm pitch contact hole was compared among the three different resists. Dose-dependent behavior of LCDU and stochastic PW for NTD were different for the PTD CAR and metal-based resist. For NTD CAR, small inhibitor level and large inhibitor fluctuation around the development threshold were observed, causing LCDU increase, which is specific to the inverse Mack development resist.

This paper presents an M-channel (M=2n (n ∈ N)) integer discrete cosine transforms (IntDCTs) based on fast Hartley transform (FHT) for lossy-to-lossless image coding which has image quality scalability from lossy data to lossless data. Many IntDCTs with lifting structures have already been presented to achieve lossy-to-lossless image coding. Recently, an IntDCT based on direct-lifting of DCT/IDCT, which means direct use of DCT and inverse DCT (IDCT) to lifting blocks, has been proposed. Although the IntDCT shows more efficient coding performance than any conventional IntDCT, it entails many computational costs due to an extra information that is a key point to realize its direct-lifting structure. On the other hand, the almost conventional IntDCTs without an extra information cannot be easily expanded to a larger size than the standard size M=8, or the conventional IntDCT should be improved for efficient coding performance even if it realizes an arbitrary size. The proposed IntDCT does not need any extra information, can be applied to size M=2n for arbitrary n, and shows better coding performance than the conventional IntDCTs without any extra information by applying the direct-lifting to the pre- and post-processing block of DCT. Moreover, the proposed IntDCT is implemented with a half of the computational cost of the IntDCT based on direct-lifting of DCT/IDCT even though it shows the best coding performance.

This paper presents an integer discrete cosine transform (IntDCT) with only dyadic values such as k/2n (k, n∈ in N). Although some conventional IntDCTs have been proposed, they are not suitable for lossless-to-lossy image coding in low-bit-word-length (coefficients) due to the degradation of the frequency decomposition performance in the system. First, the proposed M-channel lossless Walsh-Hadamard transform (LWHT) can be constructed by only (log2M)-bit-word-length and has structural regularity. Then, our 8-channel IntDCT via LWHT keeps good coding performance even if low-bit-word-length is used because LWHT, which is main part of IntDCT, can be implemented by only 3-bit-word-length. Finally, the validity of our method is proved by showing the results of lossless-to-lossy image coding in low-bit-word-length.