This paper describes latest RF Automated Test Equipment (RF ATE) technologies that include device under test (DUT) connections, a calibration method, and an RF test module mainly focusing on low cost of test (COT). Most important respect for low COT is how achieve a number of simultaneous measurements and short test time as well as a plain calibration. We realized these respects by a newly proposed calibration method and a drastically downsized RF test module with multiple resources and high throughput. The calibration method is very convenient for RF ATE. Major contribution for downsizing of the RF test module is RF circuit technology in form of RF functional system in package (RF-SIPs), resulting in very attractive test solutions.