A close correlation between the YBa2Cu3Oy film morphology and location of the (100) MgO substrate during growth by excimer laser ablation was obtained. When the susbtrate was placed inside the fringe portion of the laser plume, the spiral shape was most clearly seen on the entire film surface for both the conventional and eclipse ablation methods. When the substrate was placed outside the plume, the spiral growth was less pronounced. On the other hand, when the substrate was placed inside the plume core, marked deformation of the morphology occurred, and the superconducting critical temperature was lowered. This correlation was explained to some extent by the spatial variation of kinetic energy of the flying growth species.

This paper describes on the transmission properties of the superconducting coplanar waveguide on LiNbO3 (LN) substrates, fabricated by YBa2Cu3Oy (YBCO) superconducting films. The films have been prepared by the reactive co-evaporation method and patterned by a wet etching process. The surface resistance of the obtained film was 0.04 Ω at 18 GHz and 77 K. It was confirmed from X-ray diffraction (XRD) that these films were highly oriented to the direction of c-axis without a secondary phase. The microwave transmission properties of these YBCO coplanar waveguides were investigated at frequencies up to 20 GHz and compared with that of the aluminum coplanar waveguide. The characteristic impedances of both coplanar waveguides were designed to be 50 Ω. It was found that the attenuation constants of these samples at 77 K were less than that of the aluminum coplanar waveguide for frequencies below 18 GHz.