This paper describes on the transmission properties of the superconducting coplanar waveguide on LiNbO3 (LN) substrates, fabricated by YBa2Cu3Oy (YBCO) superconducting films. The films have been prepared by the reactive co-evaporation method and patterned by a wet etching process. The surface resistance of the obtained film was 0.04 Ω at 18 GHz and 77 K. It was confirmed from X-ray diffraction (XRD) that these films were highly oriented to the direction of c-axis without a secondary phase. The microwave transmission properties of these YBCO coplanar waveguides were investigated at frequencies up to 20 GHz and compared with that of the aluminum coplanar waveguide. The characteristic impedances of both coplanar waveguides were designed to be 50 Ω. It was found that the attenuation constants of these samples at 77 K were less than that of the aluminum coplanar waveguide for frequencies below 18 GHz.
Kiichi YOSHIARA
Fusaoki UCHIKAWA
Ken SATO
Takashi MIZUOCHI
Tadayoshi KIYAYAMA
Masayuki IZUTSU
Tadashi SUETA
Katsuhiro IMADA
Hisao WATARAI
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Kiichi YOSHIARA, Fusaoki UCHIKAWA, Ken SATO, Takashi MIZUOCHI, Tadayoshi KIYAYAMA, Masayuki IZUTSU, Tadashi SUETA, Katsuhiro IMADA, Hisao WATARAI, "A Study on Transmission Properties of YBa2Cu3Oy Coplanar Waveguide on LiNbO3 Substrate" in IEICE TRANSACTIONS on Electronics,
vol. E75-C, no. 8, pp. 888-893, August 1992, doi: .
Abstract: This paper describes on the transmission properties of the superconducting coplanar waveguide on LiNbO3 (LN) substrates, fabricated by YBa2Cu3Oy (YBCO) superconducting films. The films have been prepared by the reactive co-evaporation method and patterned by a wet etching process. The surface resistance of the obtained film was 0.04 Ω at 18 GHz and 77 K. It was confirmed from X-ray diffraction (XRD) that these films were highly oriented to the direction of c-axis without a secondary phase. The microwave transmission properties of these YBCO coplanar waveguides were investigated at frequencies up to 20 GHz and compared with that of the aluminum coplanar waveguide. The characteristic impedances of both coplanar waveguides were designed to be 50 Ω. It was found that the attenuation constants of these samples at 77 K were less than that of the aluminum coplanar waveguide for frequencies below 18 GHz.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e75-c_8_888/_p
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@ARTICLE{e75-c_8_888,
author={Kiichi YOSHIARA, Fusaoki UCHIKAWA, Ken SATO, Takashi MIZUOCHI, Tadayoshi KIYAYAMA, Masayuki IZUTSU, Tadashi SUETA, Katsuhiro IMADA, Hisao WATARAI, },
journal={IEICE TRANSACTIONS on Electronics},
title={A Study on Transmission Properties of YBa2Cu3Oy Coplanar Waveguide on LiNbO3 Substrate},
year={1992},
volume={E75-C},
number={8},
pages={888-893},
abstract={This paper describes on the transmission properties of the superconducting coplanar waveguide on LiNbO3 (LN) substrates, fabricated by YBa2Cu3Oy (YBCO) superconducting films. The films have been prepared by the reactive co-evaporation method and patterned by a wet etching process. The surface resistance of the obtained film was 0.04 Ω at 18 GHz and 77 K. It was confirmed from X-ray diffraction (XRD) that these films were highly oriented to the direction of c-axis without a secondary phase. The microwave transmission properties of these YBCO coplanar waveguides were investigated at frequencies up to 20 GHz and compared with that of the aluminum coplanar waveguide. The characteristic impedances of both coplanar waveguides were designed to be 50 Ω. It was found that the attenuation constants of these samples at 77 K were less than that of the aluminum coplanar waveguide for frequencies below 18 GHz.},
keywords={},
doi={},
ISSN={},
month={August},}
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TY - JOUR
TI - A Study on Transmission Properties of YBa2Cu3Oy Coplanar Waveguide on LiNbO3 Substrate
T2 - IEICE TRANSACTIONS on Electronics
SP - 888
EP - 893
AU - Kiichi YOSHIARA
AU - Fusaoki UCHIKAWA
AU - Ken SATO
AU - Takashi MIZUOCHI
AU - Tadayoshi KIYAYAMA
AU - Masayuki IZUTSU
AU - Tadashi SUETA
AU - Katsuhiro IMADA
AU - Hisao WATARAI
PY - 1992
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E75-C
IS - 8
JA - IEICE TRANSACTIONS on Electronics
Y1 - August 1992
AB - This paper describes on the transmission properties of the superconducting coplanar waveguide on LiNbO3 (LN) substrates, fabricated by YBa2Cu3Oy (YBCO) superconducting films. The films have been prepared by the reactive co-evaporation method and patterned by a wet etching process. The surface resistance of the obtained film was 0.04 Ω at 18 GHz and 77 K. It was confirmed from X-ray diffraction (XRD) that these films were highly oriented to the direction of c-axis without a secondary phase. The microwave transmission properties of these YBCO coplanar waveguides were investigated at frequencies up to 20 GHz and compared with that of the aluminum coplanar waveguide. The characteristic impedances of both coplanar waveguides were designed to be 50 Ω. It was found that the attenuation constants of these samples at 77 K were less than that of the aluminum coplanar waveguide for frequencies below 18 GHz.
ER -