Surface damage of the electrical contact is a primary cause of failure in many electronic devices which use sliding contacts. Therefore, the quantitative observation of the contact surface is one of the most important subjects for improvement of contact reliability. In this study, in order to clarify the relationship between the contact resistance and the damage on the contact surface, a digital image measuring system (DIMS) was developed. A shadow image processing technique (SIPT) was applied to the damage analysis on the sliding contact surface. The damage width on the contact surface and the damaged image could be obtained with a 3-D graphic image by applying both DIMS and SIPT. Part of the relationship between the damage on the contact surface and the contact resistance could be obtained in the case when Cu is used for the moving contact and Cu and Ni are used for the static contact.