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Kan OKUBO Akihiro TAKEUCHI Yukinobu NAKAMURA Nobunao TAKEUCHI
The electric field mill in our underground observation room detected a co-seismic electromagnetic signal in the vertical electrostatic field ca. 8 s after the origin time of the Niigataken Chuetsu-oki Earthquake in 2007, but ca. 30 s before the arrival time of the P-waves.
Mitsuo ICHIYA Takuro NAKAMURA Shuji NAKATA Jacques LEWINER
Micromachined sensors and actuators applied with electrostatic fields are getting widely developed. At the same time, "electrets," which are dielectrics carrying non-equilibrium permanent space charges or polarization distribution, are in demand because they improve the transducer characteristics. In this paper, we have reported on our successful fabrication of silicon dioxide electrets with extremely superior long-term charge stability by plasma chemical vapor deposition (PCVD). We have also reported on the correlation between the deposition conditions, the long-term charge stability and thermally stimulated current (TSC). Finally, the characterization of the long-term stable electrets will be described and discussed.