Fabrication of Silicon Dioxide Electrets by Plasma CVD Process for Microsystems, and Evaluation of Their Long-Term Charge Stability
Summary :
Micromachined sensors and actuators applied with electrostatic fields are getting widely developed. At the same time, "electrets," which are dielectrics carrying non-equilibrium permanent space charges or polarization distribution, are in demand because they improve the transducer characteristics. In this paper, we have reported on our successful fabrication of silicon dioxide electrets with extremely superior long-term charge stability by plasma chemical vapor deposition (PCVD). We have also reported on the correlation between the deposition conditions, the long-term charge stability and thermally stimulated current (TSC). Finally, the characterization of the long-term stable electrets will be described and discussed.
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- IEICE TRANSACTIONS on Electronics Vol.E80-C No.1 pp.174-183
- Publication Date
- 1997/01/25
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- Components
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Mitsuo ICHIYA, Takuro NAKAMURA, Shuji NAKATA, Jacques LEWINER, "Fabrication of Silicon Dioxide Electrets by Plasma CVD Process for Microsystems, and Evaluation of Their Long-Term Charge Stability" in IEICE TRANSACTIONS on Electronics,
vol. E80-C, no. 1, pp. 174-183, January 1997, doi: .
Abstract: Micromachined sensors and actuators applied with electrostatic fields are getting widely developed. At the same time, "electrets," which are dielectrics carrying non-equilibrium permanent space charges or polarization distribution, are in demand because they improve the transducer characteristics. In this paper, we have reported on our successful fabrication of silicon dioxide electrets with extremely superior long-term charge stability by plasma chemical vapor deposition (PCVD). We have also reported on the correlation between the deposition conditions, the long-term charge stability and thermally stimulated current (TSC). Finally, the characterization of the long-term stable electrets will be described and discussed.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e80-c_1_174/_p
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@ARTICLE{e80-c_1_174,
author={Mitsuo ICHIYA, Takuro NAKAMURA, Shuji NAKATA, Jacques LEWINER, },
journal={IEICE TRANSACTIONS on Electronics},
title={Fabrication of Silicon Dioxide Electrets by Plasma CVD Process for Microsystems, and Evaluation of Their Long-Term Charge Stability},
year={1997},
volume={E80-C},
number={1},
pages={174-183},
abstract={Micromachined sensors and actuators applied with electrostatic fields are getting widely developed. At the same time, "electrets," which are dielectrics carrying non-equilibrium permanent space charges or polarization distribution, are in demand because they improve the transducer characteristics. In this paper, we have reported on our successful fabrication of silicon dioxide electrets with extremely superior long-term charge stability by plasma chemical vapor deposition (PCVD). We have also reported on the correlation between the deposition conditions, the long-term charge stability and thermally stimulated current (TSC). Finally, the characterization of the long-term stable electrets will be described and discussed.},
keywords={},
doi={},
ISSN={},
month={January},}
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TY - JOUR
TI - Fabrication of Silicon Dioxide Electrets by Plasma CVD Process for Microsystems, and Evaluation of Their Long-Term Charge Stability
T2 - IEICE TRANSACTIONS on Electronics
SP - 174
EP - 183
AU - Mitsuo ICHIYA
AU - Takuro NAKAMURA
AU - Shuji NAKATA
AU - Jacques LEWINER
PY - 1997
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E80-C
IS - 1
JA - IEICE TRANSACTIONS on Electronics
Y1 - January 1997
AB - Micromachined sensors and actuators applied with electrostatic fields are getting widely developed. At the same time, "electrets," which are dielectrics carrying non-equilibrium permanent space charges or polarization distribution, are in demand because they improve the transducer characteristics. In this paper, we have reported on our successful fabrication of silicon dioxide electrets with extremely superior long-term charge stability by plasma chemical vapor deposition (PCVD). We have also reported on the correlation between the deposition conditions, the long-term charge stability and thermally stimulated current (TSC). Finally, the characterization of the long-term stable electrets will be described and discussed.
ER -
English
