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  • Evaluation of Performance in Vertical 1T-DRAM and Planar 1T-DRAM

    Yuto NORIFUSA  Tetsuo ENDOH  

     
    PAPER

      Vol:
    E95-C No:5
      Page(s):
    847-853

    The performances of the conventional planar type 1T DRAM and the Vertical type 1T DRAM are compared based on structure difference using a fully-consistent device simulator. We discuss the structural advantage of the Vertical type 1T-DRAM in comparison with the conventional planar type 1T-DRAM, and evaluate their performance in each operating mode such as write, erase, read, and hold; and discuss its cell performances such as Cell Current Margin and data retention. These results provide a useful guideline designing the high performance Vertical type 1T-DRAM cell.