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Evaluation of Performance in Vertical 1T-DRAM and Planar 1T-DRAM

Yuto NORIFUSA, Tetsuo ENDOH

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Summary :

The performances of the conventional planar type 1T DRAM and the Vertical type 1T DRAM are compared based on structure difference using a fully-consistent device simulator. We discuss the structural advantage of the Vertical type 1T-DRAM in comparison with the conventional planar type 1T-DRAM, and evaluate their performance in each operating mode such as write, erase, read, and hold; and discuss its cell performances such as Cell Current Margin and data retention. These results provide a useful guideline designing the high performance Vertical type 1T-DRAM cell.

Publication
IEICE TRANSACTIONS on Electronics Vol.E95-C No.5 pp.847-853
Publication Date
2012/05/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E95.C.847
Type of Manuscript
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
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