This paper reviews our recent progress on arrayed waveguide gratings (AWGs) using super-high-Δ silica-based planar lightwave circuit (PLC) technology and their application to integrated optical devices. Factors affecting the chip size of AWGs and the impact of increasing relative index difference Δ on the chip size are investigated, and the fabrication result of a compact athermal AWG using 2.5%-Δ silica-based waveguides is presented. As an application of super-high-Δ AWGs to integrated devices, a flat-passband multi/demultiplexer consisting of an AWG and cascaded MZIs is presented.