We investigated the electrical properties of hole transport materials such as TPD, α-NPD and m-MTDATA using in-situ field effect measurement. TPD, α-NPD and m-MTDATA films showed p-type semiconducting properties, and their electrical parameters such as conductivity, carrier mobility and carrier concentration were obtained. We also examined the effect of the substrate temperature during vacuum deposition and the thermal treatment after deposition, on the electrical parameters of the films. Experimental results showed that conductivity and carrier mobility decreased as the substrate temperature increased over the glass transition temperature. These decreases in conductivity and carrier mobility as a result of thermal treatment appear to be strongly related to the degradation mechanism of organic electroluminescent devices.