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Naoki TAKADA Masato FUJIWARA ChunWei OOI Yuki MAEDA Hirotaka NAKAYAMA Takashi KAKUE Tomoyoshi SHIMOBABA Tomoyoshi ITO
This study involves proposing a high-speed computer-generated hologram playback by using a digital micromirror device for high-definition spatiotemporal division multiplexing electroholography. Consequently, the results indicated that the study successfully reconstructed a high-definition 3-D movie of 3-D objects that was comprised of approximately 900,000 points at 60 fps when each frame was divided into twelve parts.
Masahiro ISHIMORI Minoru SASAKI Kazuhiro HANE
A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.
Minoru SASAKI Masahiro ISHIMORI JongHyeong SONG Kazuhiro HANE
An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.
Victor M. BRIGHT John H. COMTOIS J. Robert REID Darren E. SENE
The growing availability of commercial foundry processes allows easy implementation of micro-opto-electro-mechanical systems (MOEMS) for a variety of applications. Such applications go beyond single devices to include whole optical systems on a chip, consisting of mirrors, gratings, Fresnel lenses and shutters, for example. Hinged and rotating structures, combined with powerful and compact thermal actuators, provide the means for positioning and operating these optical components. This paper presents examples of such systems built in a commercial polycrystalline silicon surface-micromachining process, the ARPA-sponsored Multi-User MEMS ProcesS (MUMPS). Examples range from optical sub-components to large mirror arrays, communication components, and micro-interferometers. Using the examples discussed in this paper, a designer can take advantage of commercially available surface-micromachining processes to design and develop MOEMS without the need for extensive in-house micromachining capabilities.