Surface Micromachined Micro-Opto-Electro-Mechanical Systems
Summary :
The growing availability of commercial foundry processes allows easy implementation of micro-opto-electro-mechanical systems (MOEMS) for a variety of applications. Such applications go beyond single devices to include whole optical systems on a chip, consisting of mirrors, gratings, Fresnel lenses and shutters, for example. Hinged and rotating structures, combined with powerful and compact thermal actuators, provide the means for positioning and operating these optical components. This paper presents examples of such systems built in a commercial polycrystalline silicon surface-micromachining process, the ARPA-sponsored Multi-User MEMS ProcesS (MUMPS). Examples range from optical sub-components to large mirror arrays, communication components, and micro-interferometers. Using the examples discussed in this paper, a designer can take advantage of commercially available surface-micromachining processes to design and develop MOEMS without the need for extensive in-house micromachining capabilities.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E80-C No.2 pp.206-213
- Publication Date
- 1997/02/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section INVITED PAPER (Special Issue on Micromachine Technology)
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Victor M. BRIGHT, John H. COMTOIS, J. Robert REID, Darren E. SENE, "Surface Micromachined Micro-Opto-Electro-Mechanical Systems" in IEICE TRANSACTIONS on Electronics,
vol. E80-C, no. 2, pp. 206-213, February 1997, doi: .
Abstract: The growing availability of commercial foundry processes allows easy implementation of micro-opto-electro-mechanical systems (MOEMS) for a variety of applications. Such applications go beyond single devices to include whole optical systems on a chip, consisting of mirrors, gratings, Fresnel lenses and shutters, for example. Hinged and rotating structures, combined with powerful and compact thermal actuators, provide the means for positioning and operating these optical components. This paper presents examples of such systems built in a commercial polycrystalline silicon surface-micromachining process, the ARPA-sponsored Multi-User MEMS ProcesS (MUMPS). Examples range from optical sub-components to large mirror arrays, communication components, and micro-interferometers. Using the examples discussed in this paper, a designer can take advantage of commercially available surface-micromachining processes to design and develop MOEMS without the need for extensive in-house micromachining capabilities.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e80-c_2_206/_p
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@ARTICLE{e80-c_2_206,
author={Victor M. BRIGHT, John H. COMTOIS, J. Robert REID, Darren E. SENE, },
journal={IEICE TRANSACTIONS on Electronics},
title={Surface Micromachined Micro-Opto-Electro-Mechanical Systems},
year={1997},
volume={E80-C},
number={2},
pages={206-213},
abstract={The growing availability of commercial foundry processes allows easy implementation of micro-opto-electro-mechanical systems (MOEMS) for a variety of applications. Such applications go beyond single devices to include whole optical systems on a chip, consisting of mirrors, gratings, Fresnel lenses and shutters, for example. Hinged and rotating structures, combined with powerful and compact thermal actuators, provide the means for positioning and operating these optical components. This paper presents examples of such systems built in a commercial polycrystalline silicon surface-micromachining process, the ARPA-sponsored Multi-User MEMS ProcesS (MUMPS). Examples range from optical sub-components to large mirror arrays, communication components, and micro-interferometers. Using the examples discussed in this paper, a designer can take advantage of commercially available surface-micromachining processes to design and develop MOEMS without the need for extensive in-house micromachining capabilities.},
keywords={},
doi={},
ISSN={},
month={February},}
Copy
TY - JOUR
TI - Surface Micromachined Micro-Opto-Electro-Mechanical Systems
T2 - IEICE TRANSACTIONS on Electronics
SP - 206
EP - 213
AU - Victor M. BRIGHT
AU - John H. COMTOIS
AU - J. Robert REID
AU - Darren E. SENE
PY - 1997
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E80-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 1997
AB - The growing availability of commercial foundry processes allows easy implementation of micro-opto-electro-mechanical systems (MOEMS) for a variety of applications. Such applications go beyond single devices to include whole optical systems on a chip, consisting of mirrors, gratings, Fresnel lenses and shutters, for example. Hinged and rotating structures, combined with powerful and compact thermal actuators, provide the means for positioning and operating these optical components. This paper presents examples of such systems built in a commercial polycrystalline silicon surface-micromachining process, the ARPA-sponsored Multi-User MEMS ProcesS (MUMPS). Examples range from optical sub-components to large mirror arrays, communication components, and micro-interferometers. Using the examples discussed in this paper, a designer can take advantage of commercially available surface-micromachining processes to design and develop MOEMS without the need for extensive in-house micromachining capabilities.
ER -
English
