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Kazuo OKANO Shigeru KAMINOUCHI
We deal with a new type ceramic emitter which is used in a cleanroom ionizer system and is composed of a needle-shaped silicon and a rod-shaped silicon carbide ceramics. The discharge test was carried out to investigate the particle generation from the emitter and the degradation of the emitter. As a result, it was found that the ceramic emitter had practically higher performance than a conventional tungsten emitter.