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[Keyword] particle generation(1hit)

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  • A New Ceramic Emitter Applicable to a Cleanroom

    Kazuo OKANO  Shigeru KAMINOUCHI  

     
    LETTER-Application Specific Memory

      Vol:
    E76-C No:11
      Page(s):
    1670-1672

    We deal with a new type ceramic emitter which is used in a cleanroom ionizer system and is composed of a needle-shaped silicon and a rod-shaped silicon carbide ceramics. The discharge test was carried out to investigate the particle generation from the emitter and the degradation of the emitter. As a result, it was found that the ceramic emitter had practically higher performance than a conventional tungsten emitter.