A New Ceramic Emitter Applicable to a Cleanroom

Kazuo OKANO; Shigeru KAMINOUCHI

A New Ceramic Emitter Applicable to a Cleanroom

Kazuo OKANO, Shigeru KAMINOUCHI

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We deal with a new type ceramic emitter which is used in a cleanroom ionizer system and is composed of a needle-shaped silicon and a rod-shaped silicon carbide ceramics. The discharge test was carried out to investigate the particle generation from the emitter and the degradation of the emitter. As a result, it was found that the ceramic emitter had practically higher performance than a conventional tungsten emitter.

Publication: IEICE TRANSACTIONS on Electronics Vol.E76-C No.11 pp.1670-1672

Publication Date: 1993/11/25

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Type of Manuscript: Special Section LETTER (Special Issue on LSI Memories)

Category: Application Specific Memory

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Kazuo OKANO, Shigeru KAMINOUCHI, "A New Ceramic Emitter Applicable to a Cleanroom" in IEICE TRANSACTIONS on Electronics, vol. E76-C, no. 11, pp. 1670-1672, November 1993, doi: .
Abstract: We deal with a new type ceramic emitter which is used in a cleanroom ionizer system and is composed of a needle-shaped silicon and a rod-shaped silicon carbide ceramics. The discharge test was carried out to investigate the particle generation from the emitter and the degradation of the emitter. As a result, it was found that the ceramic emitter had practically higher performance than a conventional tungsten emitter.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e76-c_11_1670/_p

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@ARTICLE{e76-c_11_1670,
author={Kazuo OKANO, Shigeru KAMINOUCHI, },
journal={IEICE TRANSACTIONS on Electronics},
title={A New Ceramic Emitter Applicable to a Cleanroom},
year={1993},
volume={E76-C},
number={11},
pages={1670-1672},
abstract={We deal with a new type ceramic emitter which is used in a cleanroom ionizer system and is composed of a needle-shaped silicon and a rod-shaped silicon carbide ceramics. The discharge test was carried out to investigate the particle generation from the emitter and the degradation of the emitter. As a result, it was found that the ceramic emitter had practically higher performance than a conventional tungsten emitter.},
keywords={},
doi={},
ISSN={},
month={November},}

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TY - JOUR
TI - A New Ceramic Emitter Applicable to a Cleanroom
T2 - IEICE TRANSACTIONS on Electronics
SP - 1670
EP - 1672
AU - Kazuo OKANO
AU - Shigeru KAMINOUCHI
PY - 1993
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E76-C
IS - 11
JA - IEICE TRANSACTIONS on Electronics
Y1 - November 1993
AB - We deal with a new type ceramic emitter which is used in a cleanroom ionizer system and is composed of a needle-shaped silicon and a rod-shaped silicon carbide ceramics. The discharge test was carried out to investigate the particle generation from the emitter and the degradation of the emitter. As a result, it was found that the ceramic emitter had practically higher performance than a conventional tungsten emitter.
ER -