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Yoshimasa SUGIMOTO Yu TANAKA Naoki IKEDA Kyozo KANAMOTO Yusui NAKAMURA Shunsuke OHKOUCHI Hitoshi NAKAMURA Kuon INOUE Hidekazu SASAKI Yoshinori WATANABE Koji ISHIDA Hiroshi ISHIKAWA Kiyoshi ASAKAWA
We have fabricated several two-dimensional photonic-crystal (2DPC) slab waveguides by using fine electron beam lithography and dry etching. The 2DPC waveguides include straight, bend, Y-branch, directional coupler, and coupled-cavity waveguides on the GaAs/AlGaAs substrate as an application to the ultra-small and ultra-fast all-optical switching device. Transmission spectra and near field patterns were characterized in a wide wavelength range from 850 to 1600 nm with the sample finished to the air-bridge type 2DPC slab. These waveguides appear to be suitable for achieving the waveguide platform in the symmetrical-Mach-Zehnder device.
Masaya NOTOMI Akihiko SHINYA Eiichi KURAMOCHI Itaru YOKOHAMA Chiharu TAKAHASHI Koji YAMADA Jun-ichi TAKAHASHI Takayuki KAWASHIMA Shojiro KAWAKAMI
We studied various types of 2D and 3D Si-based photonic crystal structures that are promising for future photonic integrated circuit application. With regard to 2D SOI photonic crystal slabs, we confirmed the formation of a wide photonic bandgap at optical communication wavelengths, and used structural tuning to realize efficient single-mode line-defect waveguides operating within the bandgap. As regards 3D photonic crystals, we used a combination of lithography and the autocloning deposition method to realize complicated 3D structures. We used this strategy to fabricate 3D full-gap photonic crystals and 3D/2D hybrid photonic crystals.