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Ryoichi ISHIHARA Arie GLAZER Yoel RAAB Peter RUSIAN Mannie DORFAN Benzi LAVI Ilya LEIZERSON Albert KISHINEVSKY Yvonne van ANDEL Xin CAO Wim METSELAAR Kees BEENAKKER Sara STOLYAROVA Yael NEMIROVSKY
CMOS poly-Si thin-film transistors (TFTs) were fabricated through crystallization and GILD processes by a novel selected area laser assisted (SALA) system. The system enables a local area irradiation of small beams of a pulsed solid-state laser of frequency tripled Nd:YAG. The novel TFT process eliminated 3 doping mask steps of the conventional process. On-off current ratios for both types of poly-Si TFTs were improved by SALA. The field effect mobility of n- and p-channel TFTs is 84 cm2/Vs and 75 cm2/Vs, respectively.
N. P. BARRY S. C. W. HYDE Richard JONES Robert MELLISH Yuh-Ping TONG P. M. W. FRENCH J. R. TAYLOR
The characteristics of several femtosecond solid-state laser systems are described illustrating the diversity of the operational parameters of these lasers. The systems include Pr:YLF, Cr:LiSAF, Cr:Forsterite and Cr:YAG, with wavelength of operation from the visible to the near infra-red. Particular emphasis is placed upon compact, efficient pumping schemes, all-solid-state diode-pumped femtosecond oscillator configurations and newly configured, highly-efficient, tunable, femtosecond lasers pumped by high power fibre lasers.