In this paper, we discuss ferroelectric materials suitable for a metal ferroelectric metal insulator semiconductor FET (MFMIS FET). It is important for a ferroelectric material to have a low dielectric constant to enable the application of sufficient electric field to a ferroelectric layer. Films of Sr2Nb2O7 (SNO) and Sr2(Ta1-xNbx)2O7 (STNO) were prepared by the sol-gel method on Pt/IrO2 electrodes for an MFMIS FET. The ferroelectricities of STNO films were confirmed in the range of x=0. 1-0. 3. In case of x=0. 3, the largest remanent polarization was obtained in the hysteresis loop. The remanent polarization and the coercive field are 0. 5 µ C/cm2 and 44 kV/cm, respectively. The film had a low dielectric constant (ε=53). It is considered that the characteristics of STNO thin films are suitable for MFMIS FET.