Si-based photonic materials and devices, including SiGe/Si quantum structures, SOI and InGaAs bonded on Si, PL of Si nanocrystals, SOI photonic crystal filter, Si based RCE (Resonant Cavity Enhanced) photodiodes, SOI TO (thermai-optical) switch matrix were investigated in Institute of Semiconductors, Chinese Academy of Sciences. The main results in recent years are presented in the paper. The mechanism of PL from Si NCs embedded in SiO2 matrix was studied, a greater contribution of the interface state recombination (PL peak in 850~900 nm) is associated with larger Si NCs and higher interface state density. Ge dots with density of order of 1011 cm-2 were obtained by UHV/CVD growth and 193 nm excimer laser annealing. SOI photonic crystal filter with resonant wavelength of 1598 nm and Q factor of 1140 was designed and made. Si based hybrid InGaAs RCE PD with η of 34.4% and FWHM of 27 nm were achieved by MOCVD growth and bonding technology between InGaAs epitaxial and Si wafers. A 1616 SOI optical switch matrix were designed and made. A new current driving circuit was used to improve the response speed of a 44 SOI rearrangeable nonblocking TO switch matrix, rising and falling time is 970 and 750 ns, respectively.

The 1 4 optical switch array for wavelength division multiplexing system has been demonstrated where four 14 waveguide digital optical switches have been integrated into one chip. Tape fiber is used as the connection between switch modules to avoid an interconnection fiber jungle. The architecture can be adapted to any number of wavelength channels. Redundant optical switch stage for crosstalk rejection has been used to attain a low crosstalk level. Electro-optic switching is used to attain low power consumption indispensable for routing large wavelength channels.

A large scale optical switch array based on guided-wave technology using banyan network architecture is demonstrated. Banyan network architecture is the simplest NN network connecting a input port to all the output ports. A banyan network optical switch array serves as a base for constructing many classes of switch networks, as we propose in this report. We fabricated a 3232 switch and measured its characteristics. Drive voltage was about 12 V and extinction ratio was 18 dB, and the average insertion loss was 18 dB. Preliminary experiments were conducted on a 6464 device. The use of proton exchanged waveguides makes a 10 mm radius of curvature feasible.

A large scale optical switch array based on guided-wave technology using banyan network architecture is demonstrated. Banyan network architecture is the simplest NN network connecting a input port to all the output ports. A banyan network optical switch array serves as a base for constructing many classes of switch networks, as we propose in this report. We fabricated a 3232 switch and measured its characteristics. Drive voltage was about 12 V and extinction ratio was 18 dB, and the average insertion loss was 18 dB. Preliminary experiments were conducted on a 6464 device. The use of proton exchanged waveguides makes a 10 mm radius of curvature feasible.

The photonic Space-Division (SD) switching network is attractive for constructing flexible broadband networks. This paper first describes possible applications of the network. A broadband STM switching system, Digital Cross-connect System (DCS) and Video signal distribution switch, especially for HDTV signals, are attractive near term applications. Recent activities on photonic SD switching network developments aiming at these application are also reviewed. A 128 line prototype switching system has been developed. This system utilizes LiNbO3 photonic switch matrices, semiconductor traveling wave amplifiers (TWAs) and three dimensional optical interconnections for multi stage switching networks. It is confirmed that the system has been operating in providing 150Mb/s TV phone services and 600Mb/s HDTV distribution services with high stability. An experimental optical Digital Crossconnect System (optical DCS) has also been demonstrated. Line failure restoration operation at 2.4Gb/s has been successfully demonstrated. These experimental demonstrations prove that practical photonic switching systems are feasible with current technologies.