IEICE TRANSACTIONS on Communications
Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis
Summary :
The authors have proposed a 1 m2 single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.
- Publication
- IEICE TRANSACTIONS on Communications Vol.E89-B No.5 pp.1627-1635
- Publication Date
- 2006/05/01
- Publicized
- Online ISSN
- 1745-1345
- DOI
- 10.1093/ietcom/e89-b.5.1627
- Type of Manuscript
- PAPER
- Category
- Antennas and Propagation
Authors
Takuichi HIRANO
Kimio SAKURAI
Jiro HIROKAWA
Makoto ANDO
Tetsuya IDE
Atsushi SASAKI
Kazufumi AZUMA
Yukihiko NAKATA
Keyword
Latest Issue
Copyrights notice of machine-translated contents
The copyright of the original papers published on this site belongs to IEICE. Unauthorized use of the original or translated papers is prohibited. See IEICE Provisions on Copyright for details.
Cite this
Copy
Takuichi HIRANO, Kimio SAKURAI, Jiro HIROKAWA, Makoto ANDO, Tetsuya IDE, Atsushi SASAKI, Kazufumi AZUMA, Yukihiko NAKATA, "Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis" in IEICE TRANSACTIONS on Communications,
vol. E89-B, no. 5, pp. 1627-1635, May 2006, doi: 10.1093/ietcom/e89-b.5.1627.
Abstract: The authors have proposed a 1 m2 single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.
URL: https://global.ieice.org/en_transactions/communications/10.1093/ietcom/e89-b.5.1627/_p
Copy
@ARTICLE{e89-b_5_1627,
author={Takuichi HIRANO, Kimio SAKURAI, Jiro HIROKAWA, Makoto ANDO, Tetsuya IDE, Atsushi SASAKI, Kazufumi AZUMA, Yukihiko NAKATA, },
journal={IEICE TRANSACTIONS on Communications},
title={Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis},
year={2006},
volume={E89-B},
number={5},
pages={1627-1635},
abstract={The authors have proposed a 1 m2 single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.},
keywords={},
doi={10.1093/ietcom/e89-b.5.1627},
ISSN={1745-1345},
month={May},}
Copy
TY - JOUR
TI - Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis
T2 - IEICE TRANSACTIONS on Communications
SP - 1627
EP - 1635
AU - Takuichi HIRANO
AU - Kimio SAKURAI
AU - Jiro HIROKAWA
AU - Makoto ANDO
AU - Tetsuya IDE
AU - Atsushi SASAKI
AU - Kazufumi AZUMA
AU - Yukihiko NAKATA
PY - 2006
DO - 10.1093/ietcom/e89-b.5.1627
JO - IEICE TRANSACTIONS on Communications
SN - 1745-1345
VL - E89-B
IS - 5
JA - IEICE TRANSACTIONS on Communications
Y1 - May 2006
AB - The authors have proposed a 1 m2 single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.
ER -
English
