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Characterization of 2-bit Recessed Channel Memory with Lifted-Charge Trapping Node (L-CTN) Scheme

Jang Gn YUN, Il Han PARK, Seongjae CHO, Jung Hoon LEE, Doo-Hyun KIM, Gil Sung LEE, Yoon KIM, Jong Duk LEE, Byung-Gook PARK

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Summary :

In this paper, characteristics of the 2-bit recessed channel memory with lifted-charge trapping nodes are investigated. The length between the charge trapping nodes through channel, which is defined as the effective memory node length (Meff), is extended by lifting up them. The dependence of VTH window and short channel effect (SCE) on the recessed depth is analyzed. Improvement of short channel effect is achieved because the recessed channel structure increases the effective channel length (Leff). Moreover, this device shows highly scalable memory characteristics without suffering from the bottom-side effect (BSE).

Publication
IEICE TRANSACTIONS on Electronics Vol.E91-C No.5 pp.742-746
Publication Date
2008/05/01
Publicized
Online ISSN
1745-1353
DOI
10.1093/ietele/e91-c.5.742
Type of Manuscript
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
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