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IEICE TRANSACTIONS on Electronics

A New Packaging Technology for GaAs MMIC Modules

Hisashi TOMIMURO, Fuminori ISHITSUKA, Nobuo SATO, Masahiro MURAGUCHI

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Summary :

A new impedance matched film carrier is developed to package uniplanar MMICs. The carrier has an insulating polyimide film on which RF, DC bias, and ground conductive areas are formed. The areas extend into bonding windows, which are etched in the polyimide film, and the extended portions form inner and outer leads. The interconnection of the inner and outer leads to MMIC-electrode pads is highly reliable because of the gold-plated bumps formed at the distal ends of the inner and outer leads. This carrier has an insertion loss of less than 0.2 dB/mm without resonance over the frequency range from DC to 30 GHz. The electrical performance of the GaAs MMIC module with this carrier is almost equal to that of the MMIC measured directly on-wafer.

Publication
IEICE TRANSACTIONS on Electronics Vol.E74-C No.5 pp.1209-1213
Publication Date
1991/05/25
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section PAPER (Special Issue on the 3rd Asia-Pacific Microwave Conference)
Category
Active Devices and Circuits

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