IEICE TRANSACTIONS on Electronics
Process Diagnostic and Fluctuation Analysis Using a Two-Dimensional Simulation System with a New Linearized Iteration Method
Summary :
A new simulation system, which is composed of two-dimensional process simulator and inference engine, has been developed as one of the prototype systems for analysing process tolerance and fluctuation in individual process parameters. A general concept of the system, algorithm of process fluctuation analysis and inference engine of AI software package are presented. Typical evidences of results obtained are also demonstrated.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E74-C No.6 pp.1677-1682
- Publication Date
- 1991/06/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on Device and Process Simulation for Ultra Large Scale Integration)
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Shinji ONGA, "Process Diagnostic and Fluctuation Analysis Using a Two-Dimensional Simulation System with a New Linearized Iteration Method" in IEICE TRANSACTIONS on Electronics,
vol. E74-C, no. 6, pp. 1677-1682, June 1991, doi: .
Abstract: A new simulation system, which is composed of two-dimensional process simulator and inference engine, has been developed as one of the prototype systems for analysing process tolerance and fluctuation in individual process parameters. A general concept of the system, algorithm of process fluctuation analysis and inference engine of AI software package are presented. Typical evidences of results obtained are also demonstrated.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e74-c_6_1677/_p
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@ARTICLE{e74-c_6_1677,
author={Shinji ONGA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Process Diagnostic and Fluctuation Analysis Using a Two-Dimensional Simulation System with a New Linearized Iteration Method},
year={1991},
volume={E74-C},
number={6},
pages={1677-1682},
abstract={A new simulation system, which is composed of two-dimensional process simulator and inference engine, has been developed as one of the prototype systems for analysing process tolerance and fluctuation in individual process parameters. A general concept of the system, algorithm of process fluctuation analysis and inference engine of AI software package are presented. Typical evidences of results obtained are also demonstrated.},
keywords={},
doi={},
ISSN={},
month={June},}
Copy
TY - JOUR
TI - Process Diagnostic and Fluctuation Analysis Using a Two-Dimensional Simulation System with a New Linearized Iteration Method
T2 - IEICE TRANSACTIONS on Electronics
SP - 1677
EP - 1682
AU - Shinji ONGA
PY - 1991
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E74-C
IS - 6
JA - IEICE TRANSACTIONS on Electronics
Y1 - June 1991
AB - A new simulation system, which is composed of two-dimensional process simulator and inference engine, has been developed as one of the prototype systems for analysing process tolerance and fluctuation in individual process parameters. A general concept of the system, algorithm of process fluctuation analysis and inference engine of AI software package are presented. Typical evidences of results obtained are also demonstrated.
ER -
English
