Data Compaction and Expansion Method for an Electron Beam Direct Writing System Using a Variably Shaped Line Beam
Summary :
Data compaction and data expansion methods for an electron beam direct writing system EBM-130V are described. EBM-130V adopts the raster scan method using a variably shaped line beam. The system does not have an effective hierarchical structure in its data format, because it has only a single deflector. So, an extra virtual layer has been introduced into the EB data format, and an artificial hierarchical data structure is used for data compaction. The compacted data is expanded by an EB control software system. For a 4 Mbit DRAM, the data amount was about 30 MBytes (compaction rate 1/16), the data conversion time was about 12 minutes (reduction rate 1/35), and the data transfer time from the system disk to the pattern data memory was reduced to about 1/5, by using the date compaction method.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E74-C No.8 pp.2384-2389
- Publication Date
- 1991/08/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- PAPER
- Category
- Vacuum and Beam Technologies
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Takayuki ABE, Mineo GOTO, Ryoichi YOSHIKAWA, Susumu WATANABE, Tadahiro TAKIGAWA, "Data Compaction and Expansion Method for an Electron Beam Direct Writing System Using a Variably Shaped Line Beam" in IEICE TRANSACTIONS on Electronics,
vol. E74-C, no. 8, pp. 2384-2389, August 1991, doi: .
Abstract: Data compaction and data expansion methods for an electron beam direct writing system EBM-130V are described. EBM-130V adopts the raster scan method using a variably shaped line beam. The system does not have an effective hierarchical structure in its data format, because it has only a single deflector. So, an extra virtual layer has been introduced into the EB data format, and an artificial hierarchical data structure is used for data compaction. The compacted data is expanded by an EB control software system. For a 4 Mbit DRAM, the data amount was about 30 MBytes (compaction rate 1/16), the data conversion time was about 12 minutes (reduction rate 1/35), and the data transfer time from the system disk to the pattern data memory was reduced to about 1/5, by using the date compaction method.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e74-c_8_2384/_p
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@ARTICLE{e74-c_8_2384,
author={Takayuki ABE, Mineo GOTO, Ryoichi YOSHIKAWA, Susumu WATANABE, Tadahiro TAKIGAWA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Data Compaction and Expansion Method for an Electron Beam Direct Writing System Using a Variably Shaped Line Beam},
year={1991},
volume={E74-C},
number={8},
pages={2384-2389},
abstract={Data compaction and data expansion methods for an electron beam direct writing system EBM-130V are described. EBM-130V adopts the raster scan method using a variably shaped line beam. The system does not have an effective hierarchical structure in its data format, because it has only a single deflector. So, an extra virtual layer has been introduced into the EB data format, and an artificial hierarchical data structure is used for data compaction. The compacted data is expanded by an EB control software system. For a 4 Mbit DRAM, the data amount was about 30 MBytes (compaction rate 1/16), the data conversion time was about 12 minutes (reduction rate 1/35), and the data transfer time from the system disk to the pattern data memory was reduced to about 1/5, by using the date compaction method.},
keywords={},
doi={},
ISSN={},
month={August},}
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TY - JOUR
TI - Data Compaction and Expansion Method for an Electron Beam Direct Writing System Using a Variably Shaped Line Beam
T2 - IEICE TRANSACTIONS on Electronics
SP - 2384
EP - 2389
AU - Takayuki ABE
AU - Mineo GOTO
AU - Ryoichi YOSHIKAWA
AU - Susumu WATANABE
AU - Tadahiro TAKIGAWA
PY - 1991
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E74-C
IS - 8
JA - IEICE TRANSACTIONS on Electronics
Y1 - August 1991
AB - Data compaction and data expansion methods for an electron beam direct writing system EBM-130V are described. EBM-130V adopts the raster scan method using a variably shaped line beam. The system does not have an effective hierarchical structure in its data format, because it has only a single deflector. So, an extra virtual layer has been introduced into the EB data format, and an artificial hierarchical data structure is used for data compaction. The compacted data is expanded by an EB control software system. For a 4 Mbit DRAM, the data amount was about 30 MBytes (compaction rate 1/16), the data conversion time was about 12 minutes (reduction rate 1/35), and the data transfer time from the system disk to the pattern data memory was reduced to about 1/5, by using the date compaction method.
ER -
English
