An integrated CAD/CAM system for MMIC development has been firstly realized, which consists of electron beam direct drawing, microwave circuit simulator, pattern generator and RF &DC on-wafer automatic measurement subsystems, connected through an Ethernet LAN. The system can develop not only new MMICs and their element devices, but also their accurate simulation models quickly and efficiently. Preliminary successful applications of this system have been demonstrated by DC-HFET with a 0.25 µm T-shaped gate electrode and MMIC low-noise amplifiers operating at X- and L-bands.
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Takashi YAMADA, Masao NISHIDA, Tetsuro SAWAI, Yasoo HARADA, "An Integrated MMIC CAD System" in IEICE TRANSACTIONS on Electronics,
vol. E75-C, no. 6, pp. 656-662, June 1992, doi: .
Abstract: An integrated CAD/CAM system for MMIC development has been firstly realized, which consists of electron beam direct drawing, microwave circuit simulator, pattern generator and RF &DC on-wafer automatic measurement subsystems, connected through an Ethernet LAN. The system can develop not only new MMICs and their element devices, but also their accurate simulation models quickly and efficiently. Preliminary successful applications of this system have been demonstrated by DC-HFET with a 0.25 µm T-shaped gate electrode and MMIC low-noise amplifiers operating at X- and L-bands.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e75-c_6_656/_p
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@ARTICLE{e75-c_6_656,
author={Takashi YAMADA, Masao NISHIDA, Tetsuro SAWAI, Yasoo HARADA, },
journal={IEICE TRANSACTIONS on Electronics},
title={An Integrated MMIC CAD System},
year={1992},
volume={E75-C},
number={6},
pages={656-662},
abstract={An integrated CAD/CAM system for MMIC development has been firstly realized, which consists of electron beam direct drawing, microwave circuit simulator, pattern generator and RF &DC on-wafer automatic measurement subsystems, connected through an Ethernet LAN. The system can develop not only new MMICs and their element devices, but also their accurate simulation models quickly and efficiently. Preliminary successful applications of this system have been demonstrated by DC-HFET with a 0.25 µm T-shaped gate electrode and MMIC low-noise amplifiers operating at X- and L-bands.},
keywords={},
doi={},
ISSN={},
month={June},}
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TY - JOUR
TI - An Integrated MMIC CAD System
T2 - IEICE TRANSACTIONS on Electronics
SP - 656
EP - 662
AU - Takashi YAMADA
AU - Masao NISHIDA
AU - Tetsuro SAWAI
AU - Yasoo HARADA
PY - 1992
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E75-C
IS - 6
JA - IEICE TRANSACTIONS on Electronics
Y1 - June 1992
AB - An integrated CAD/CAM system for MMIC development has been firstly realized, which consists of electron beam direct drawing, microwave circuit simulator, pattern generator and RF &DC on-wafer automatic measurement subsystems, connected through an Ethernet LAN. The system can develop not only new MMICs and their element devices, but also their accurate simulation models quickly and efficiently. Preliminary successful applications of this system have been demonstrated by DC-HFET with a 0.25 µm T-shaped gate electrode and MMIC low-noise amplifiers operating at X- and L-bands.
ER -