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An Integrated MMIC CAD System

Takashi YAMADA, Masao NISHIDA, Tetsuro SAWAI, Yasoo HARADA

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Summary :

An integrated CAD/CAM system for MMIC development has been firstly realized, which consists of electron beam direct drawing, microwave circuit simulator, pattern generator and RF &DC on-wafer automatic measurement subsystems, connected through an Ethernet LAN. The system can develop not only new MMICs and their element devices, but also their accurate simulation models quickly and efficiently. Preliminary successful applications of this system have been demonstrated by DC-HFET with a 0.25 µm T-shaped gate electrode and MMIC low-noise amplifiers operating at X- and L-bands.

Publication
IEICE TRANSACTIONS on Electronics Vol.E75-C No.6 pp.656-662
Publication Date
1992/06/25
Publicized
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DOI
Type of Manuscript
Special Section PAPER (Special Issue on MMIC Technology)
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