IEICE TRANSACTIONS on Electronics
The Analysis of Waveguiding Effects on the Minimum Transferable Linewidth of an Ultrafine X-Ray Mask
Summary :
The minimum transferable linewidth by X-ray is derived using waveguide analysis. The minimum width is determined by the refractive index of the absorber and does not depend on the X-ray wavelength. Therefore there is an optimum mask aperture size which provides the minimum linewidth. By using Au as the absorber, 8 nm linewidth is attainable.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E76-C No.4 pp.594-599
- Publication Date
- 1993/04/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
- Category
- Process Technology
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Keyword
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Masaki TAKAKUWA, Kazuhito FURUYA, "The Analysis of Waveguiding Effects on the Minimum Transferable Linewidth of an Ultrafine X-Ray Mask" in IEICE TRANSACTIONS on Electronics,
vol. E76-C, no. 4, pp. 594-599, April 1993, doi: .
Abstract: The minimum transferable linewidth by X-ray is derived using waveguide analysis. The minimum width is determined by the refractive index of the absorber and does not depend on the X-ray wavelength. Therefore there is an optimum mask aperture size which provides the minimum linewidth. By using Au as the absorber, 8 nm linewidth is attainable.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e76-c_4_594/_p
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@ARTICLE{e76-c_4_594,
author={Masaki TAKAKUWA, Kazuhito FURUYA, },
journal={IEICE TRANSACTIONS on Electronics},
title={The Analysis of Waveguiding Effects on the Minimum Transferable Linewidth of an Ultrafine X-Ray Mask},
year={1993},
volume={E76-C},
number={4},
pages={594-599},
abstract={The minimum transferable linewidth by X-ray is derived using waveguide analysis. The minimum width is determined by the refractive index of the absorber and does not depend on the X-ray wavelength. Therefore there is an optimum mask aperture size which provides the minimum linewidth. By using Au as the absorber, 8 nm linewidth is attainable.},
keywords={},
doi={},
ISSN={},
month={April},}
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TY - JOUR
TI - The Analysis of Waveguiding Effects on the Minimum Transferable Linewidth of an Ultrafine X-Ray Mask
T2 - IEICE TRANSACTIONS on Electronics
SP - 594
EP - 599
AU - Masaki TAKAKUWA
AU - Kazuhito FURUYA
PY - 1993
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E76-C
IS - 4
JA - IEICE TRANSACTIONS on Electronics
Y1 - April 1993
AB - The minimum transferable linewidth by X-ray is derived using waveguide analysis. The minimum width is determined by the refractive index of the absorber and does not depend on the X-ray wavelength. Therefore there is an optimum mask aperture size which provides the minimum linewidth. By using Au as the absorber, 8 nm linewidth is attainable.
ER -
English
