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An Integrated Efficient Method for Deep-Submicron EPROM/Flash Device Simulation Using Energy Transport Model

Jack Zezhong PENG, Steve LONGCOR, Jeffrey FREY

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Summary :

An efficient method which integrates a 2-D energy transport model, impact ionization model, gate current model, a discretized gate-capacitor EPROM model, and a post-processing quasi-transient programming/erase method, was developed for deep-submicron EPROM/Flash device simulation. The predicted results showed on the average better than 90% accuracy, and it took only few minutes CPU time on a SUN/SPARC2 to generate EPROM/Flash Vt shift curves.

Publication
IEICE TRANSACTIONS on Electronics Vol.E77-C No.2 pp.166-173
Publication Date
1994/02/25
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section PAPER (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD 93))
Category
Device Simulation

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