Dry-Released Nickel Micromotors with Low-Friction Bearing Structure

Toshiki HIRANO; Tomotake FURUHATA; Hiroyuki FUJITA

Dry-Released Nickel Micromotors with Low-Friction Bearing Structure

Toshiki HIRANO, Tomotake FURUHATA, Hiroyuki FUJITA

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A new electrostatic wobble motor design and fabrication method were proposed, and micromotors were successfully fabricated and operated. The advantages are (1) thicker structural size, resulting in larger torque, (2) simple and safe fabrication process and (3) needle-shaped bearing to support the rotor. Needle-shaped bearing used here is expected to have lower friction comparing with the existing motor, since the load is smaller for this kind of bearing structure. Two major sources of the load, electrostatic force and capillary force, were considered to prove this tendency. Diamond-like Carbon (DLC) film was employed as a solid lubricant for its bearing. The friction of DLC and that of ilicon-dioxide were compared by experiment.

Publication: IEICE TRANSACTIONS on Electronics Vol.E78-C No.2 pp.132-138

Publication Date: 1995/02/25

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Type of Manuscript: Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems)

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Toshiki HIRANO, Tomotake FURUHATA, Hiroyuki FUJITA, "Dry-Released Nickel Micromotors with Low-Friction Bearing Structure" in IEICE TRANSACTIONS on Electronics, vol. E78-C, no. 2, pp. 132-138, February 1995, doi: .
Abstract: A new electrostatic wobble motor design and fabrication method were proposed, and micromotors were successfully fabricated and operated. The advantages are (1) thicker structural size, resulting in larger torque, (2) simple and safe fabrication process and (3) needle-shaped bearing to support the rotor. Needle-shaped bearing used here is expected to have lower friction comparing with the existing motor, since the load is smaller for this kind of bearing structure. Two major sources of the load, electrostatic force and capillary force, were considered to prove this tendency. Diamond-like Carbon (DLC) film was employed as a solid lubricant for its bearing. The friction of DLC and that of ilicon-dioxide were compared by experiment.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e78-c_2_132/_p

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@ARTICLE{e78-c_2_132,
author={Toshiki HIRANO, Tomotake FURUHATA, Hiroyuki FUJITA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Dry-Released Nickel Micromotors with Low-Friction Bearing Structure},
year={1995},
volume={E78-C},
number={2},
pages={132-138},
abstract={A new electrostatic wobble motor design and fabrication method were proposed, and micromotors were successfully fabricated and operated. The advantages are (1) thicker structural size, resulting in larger torque, (2) simple and safe fabrication process and (3) needle-shaped bearing to support the rotor. Needle-shaped bearing used here is expected to have lower friction comparing with the existing motor, since the load is smaller for this kind of bearing structure. Two major sources of the load, electrostatic force and capillary force, were considered to prove this tendency. Diamond-like Carbon (DLC) film was employed as a solid lubricant for its bearing. The friction of DLC and that of ilicon-dioxide were compared by experiment.},
keywords={},
doi={},
ISSN={},
month={February},}

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TY - JOUR
TI - Dry-Released Nickel Micromotors with Low-Friction Bearing Structure
T2 - IEICE TRANSACTIONS on Electronics
SP - 132
EP - 138
AU - Toshiki HIRANO
AU - Tomotake FURUHATA
AU - Hiroyuki FUJITA
PY - 1995
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E78-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 1995
AB - A new electrostatic wobble motor design and fabrication method were proposed, and micromotors were successfully fabricated and operated. The advantages are (1) thicker structural size, resulting in larger torque, (2) simple and safe fabrication process and (3) needle-shaped bearing to support the rotor. Needle-shaped bearing used here is expected to have lower friction comparing with the existing motor, since the load is smaller for this kind of bearing structure. Two major sources of the load, electrostatic force and capillary force, were considered to prove this tendency. Diamond-like Carbon (DLC) film was employed as a solid lubricant for its bearing. The friction of DLC and that of ilicon-dioxide were compared by experiment.
ER -