Our investigation of diamond-like carbon (DLC) nano-springs with a 130 nm spring-section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings using in situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of DLC nanosprings on spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07 N/m. The diameter dependence of spring constant can be accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70 GPa. This value is very close to the value of conventional coil springs made of steel. Furthermore, we measured the stiffness of a DLC nanospring annealed at 1000 in vacuum. The stiffness was decreased to approximately half of the stiffness of the nanospring without annealing.

Field emission display (FED) is evolving as a promising technique of flat panel displays in the future. In this paper, various carbon based nanostructures are acted as cathode materials for field emission devices. Dendrite-like diamond-like carbon emitters, carbon nanotubes, carbon nanotips are synthesized by microwave plasma chemical vapor deposition. Many factors affect the performance of field emitters, such as the shape, work function and aspect ratio of emission materials. Modified process of carbon based nano-materials for enhancing field emission efficiency are included intrinsic and extrinsic process. These reformations contain the p-type and n-type doping, carburization and new ultra well-aligned carbon nano-materials. It is found that carbon nano-materials grown on micropatterned diode show higher efficiency of FED. In addition, to achieve a low- turn-on field, the novel scheme involving a new fabrication process of gated structure metal-insulator-semiconductor (MIS) diode by IC technology is also presented.

Electron field emission from diamond, diamond-like carbon, carbon nanotubes and nano-structured carbon is compared. It is found that in all practical cases, emission occurs from regions of positive electron affinity with an emission barrier of 5eV, the work function, and with a large field enhancement. The field enhancement in nanotubes arises from their geometry. In diamond, the field enhancement occurs by depletion of grain boundary states. In diamond-like carbon we propose that it occurs by the presence of sp2-rich channels formed by the soft conditioning process.

A new electrostatic wobble motor design and fabrication method were proposed, and micromotors were successfully fabricated and operated. The advantages are (1) thicker structural size, resulting in larger torque, (2) simple and safe fabrication process and (3) needle-shaped bearing to support the rotor. Needle-shaped bearing used here is expected to have lower friction comparing with the existing motor, since the load is smaller for this kind of bearing structure. Two major sources of the load, electrostatic force and capillary force, were considered to prove this tendency. Diamond-like Carbon (DLC) film was employed as a solid lubricant for its bearing. The friction of DLC and that of ilicon-dioxide were compared by experiment.