IEICE TRANSACTIONS on Electronics
Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics
Summary :
Our investigation of diamond-like carbon (DLC) nano-springs with a 130 nm spring-section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings using in situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of DLC nanosprings on spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07 N/m. The diameter dependence of spring constant can be accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70 GPa. This value is very close to the value of conventional coil springs made of steel. Furthermore, we measured the stiffness of a DLC nanospring annealed at 1000
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E90-C No.1 pp.41-45
- Publication Date
- 2007/01/01
- Publicized
- Online ISSN
- 1745-1353
- DOI
- 10.1093/ietele/e90-c.1.41
- Type of Manuscript
- Special Section PAPER (Special Section on Microoptomechatronics)
- Category
- Micro/Nano Fabrication
Authors
Kenichiro NAKAMATSU
Masao NAGASE
Toshinari ICHIHASHI
Kazuhiro KANDA
Yuichi HARUYAMA
Takashi KAITO
Shinji MATSUI
Keyword
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Kenichiro NAKAMATSU, Masao NAGASE, Toshinari ICHIHASHI, Kazuhiro KANDA, Yuichi HARUYAMA, Takashi KAITO, Shinji MATSUI, "Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics" in IEICE TRANSACTIONS on Electronics,
vol. E90-C, no. 1, pp. 41-45, January 2007, doi: 10.1093/ietele/e90-c.1.41.
Abstract: Our investigation of diamond-like carbon (DLC) nano-springs with a 130 nm spring-section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings using in situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of DLC nanosprings on spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07 N/m. The diameter dependence of spring constant can be accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70 GPa. This value is very close to the value of conventional coil springs made of steel. Furthermore, we measured the stiffness of a DLC nanospring annealed at 1000
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e90-c.1.41/_p
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@ARTICLE{e90-c_1_41,
author={Kenichiro NAKAMATSU, Masao NAGASE, Toshinari ICHIHASHI, Kazuhiro KANDA, Yuichi HARUYAMA, Takashi KAITO, Shinji MATSUI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics},
year={2007},
volume={E90-C},
number={1},
pages={41-45},
abstract={Our investigation of diamond-like carbon (DLC) nano-springs with a 130 nm spring-section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings using in situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of DLC nanosprings on spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07 N/m. The diameter dependence of spring constant can be accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70 GPa. This value is very close to the value of conventional coil springs made of steel. Furthermore, we measured the stiffness of a DLC nanospring annealed at 1000
keywords={},
doi={10.1093/ietele/e90-c.1.41},
ISSN={1745-1353},
month={January},}
Copy
TY - JOUR
TI - Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics
T2 - IEICE TRANSACTIONS on Electronics
SP - 41
EP - 45
AU - Kenichiro NAKAMATSU
AU - Masao NAGASE
AU - Toshinari ICHIHASHI
AU - Kazuhiro KANDA
AU - Yuichi HARUYAMA
AU - Takashi KAITO
AU - Shinji MATSUI
PY - 2007
DO - 10.1093/ietele/e90-c.1.41
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E90-C
IS - 1
JA - IEICE TRANSACTIONS on Electronics
Y1 - January 2007
AB - Our investigation of diamond-like carbon (DLC) nano-springs with a 130 nm spring-section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings using in situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of DLC nanosprings on spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07 N/m. The diameter dependence of spring constant can be accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70 GPa. This value is very close to the value of conventional coil springs made of steel. Furthermore, we measured the stiffness of a DLC nanospring annealed at 1000
ER -
English
