A Scalable and Flexible CIM System with Precise and Quick Scheduler for ASIC

Kou WADA; Tsuneo OKUBO; Satoshi TAZAWA; Tetsuma SAKURAI; Eisuke ARAI

A Scalable and Flexible CIM System with Precise and Quick Scheduler for ASIC

Kou WADA, Tsuneo OKUBO, Satoshi TAZAWA, Tetsuma SAKURAI, Eisuke ARAI

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A scalable and flexible ASIC CIM system distributed on UNIX workstations, ORCHARD , has been developed. It is designed from three viewpoints: (1) cost and TAT reduction in system construction, (2) flexibility in data management for quality control, and (3) precise and quick scheduling and effective lot tracking to control TAT for each lot. The concept of a "virtual machine" is introduced to connect equipment having various protocols to a host system. The virtual machine is automatically generated at an average automatic generation ratio of as high as 89%, which leads to a reduction in cost and TAT in system construction. Data for quality control is managed by changing flexibly the "data processing recipe." This recipe defines screen format, data collected from equipment, and data transfered from various databases. Precise scheduling of lots with various levels of priority is achieved by introducing a priority evaluation function, thereby reducing scheduling time to 1/20 that for manual scheduling.

Publication: IEICE TRANSACTIONS on Electronics Vol.E78-C No.3 pp.229-235

Publication Date: 1995/03/25

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Type of Manuscript: Special Section PAPER (Special Issue on Sub-1/4 Micron Device and Process Technologies)

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Kou WADA, Tsuneo OKUBO, Satoshi TAZAWA, Tetsuma SAKURAI, Eisuke ARAI, "A Scalable and Flexible CIM System with Precise and Quick Scheduler for ASIC" in IEICE TRANSACTIONS on Electronics, vol. E78-C, no. 3, pp. 229-235, March 1995, doi: .
Abstract: A scalable and flexible ASIC CIM system distributed on UNIX workstations, ORCHARD , has been developed. It is designed from three viewpoints: (1) cost and TAT reduction in system construction, (2) flexibility in data management for quality control, and (3) precise and quick scheduling and effective lot tracking to control TAT for each lot. The concept of a "virtual machine" is introduced to connect equipment having various protocols to a host system. The virtual machine is automatically generated at an average automatic generation ratio of as high as 89%, which leads to a reduction in cost and TAT in system construction. Data for quality control is managed by changing flexibly the "data processing recipe." This recipe defines screen format, data collected from equipment, and data transfered from various databases. Precise scheduling of lots with various levels of priority is achieved by introducing a priority evaluation function, thereby reducing scheduling time to 1/20 that for manual scheduling.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e78-c_3_229/_p

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@ARTICLE{e78-c_3_229,
author={Kou WADA, Tsuneo OKUBO, Satoshi TAZAWA, Tetsuma SAKURAI, Eisuke ARAI, },
journal={IEICE TRANSACTIONS on Electronics},
title={A Scalable and Flexible CIM System with Precise and Quick Scheduler for ASIC},
year={1995},
volume={E78-C},
number={3},
pages={229-235},
abstract={A scalable and flexible ASIC CIM system distributed on UNIX workstations, ORCHARD , has been developed. It is designed from three viewpoints: (1) cost and TAT reduction in system construction, (2) flexibility in data management for quality control, and (3) precise and quick scheduling and effective lot tracking to control TAT for each lot. The concept of a "virtual machine" is introduced to connect equipment having various protocols to a host system. The virtual machine is automatically generated at an average automatic generation ratio of as high as 89%, which leads to a reduction in cost and TAT in system construction. Data for quality control is managed by changing flexibly the "data processing recipe." This recipe defines screen format, data collected from equipment, and data transfered from various databases. Precise scheduling of lots with various levels of priority is achieved by introducing a priority evaluation function, thereby reducing scheduling time to 1/20 that for manual scheduling.},
keywords={},
doi={},
ISSN={},
month={March},}

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TY - JOUR
TI - A Scalable and Flexible CIM System with Precise and Quick Scheduler for ASIC
T2 - IEICE TRANSACTIONS on Electronics
SP - 229
EP - 235
AU - Kou WADA
AU - Tsuneo OKUBO
AU - Satoshi TAZAWA
AU - Tetsuma SAKURAI
AU - Eisuke ARAI
PY - 1995
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E78-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 1995
AB - A scalable and flexible ASIC CIM system distributed on UNIX workstations, ORCHARD , has been developed. It is designed from three viewpoints: (1) cost and TAT reduction in system construction, (2) flexibility in data management for quality control, and (3) precise and quick scheduling and effective lot tracking to control TAT for each lot. The concept of a "virtual machine" is introduced to connect equipment having various protocols to a host system. The virtual machine is automatically generated at an average automatic generation ratio of as high as 89%, which leads to a reduction in cost and TAT in system construction. Data for quality control is managed by changing flexibly the "data processing recipe." This recipe defines screen format, data collected from equipment, and data transfered from various databases. Precise scheduling of lots with various levels of priority is achieved by introducing a priority evaluation function, thereby reducing scheduling time to 1/20 that for manual scheduling.
ER -