Neutralization of Static Electricity by Soft X-Ray and Vacuum Ultraviolet(UV)-Ray Irradiation

Hitoshi INABA; Tadahiro OHMI; Takanori YOSHIDA; Takao OKADA

Neutralization of Static Electricity by Soft X-Ray and Vacuum Ultraviolet(UV)-Ray Irradiation

Hitoshi INABA, Tadahiro OHMI, Takanori YOSHIDA, Takao OKADA

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A new anti-static technology to neutralize static electricity by high energy photon irradiation has been developed. Ions and electrons required for neutralization are generated by ionization of gas molecules in the vicinity of a charged substance. Gas molecules absorbs photons to become ionized. The wavelength chosen for the irradiation depends on the neutralization atmosphere. Soft X-rays with wavelength over about 1 are effective in air or O₂ gas at pressure higher than several hundreds Torr. Vacuum UV-rays with wavelength below about 1350 is effective in N₂ gas, Ar gas, or reduced pressure ambients. These methods feature excellent neutralization capa-bility. Electrostatic potential can be reduced to 0 V in a very short time without encountering the problems of which conven-tional corona discharge ionizers.

Publication: IEICE TRANSACTIONS on Electronics Vol.E79-C No.3 pp.328-336

Publication Date: 1996/03/25

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Type of Manuscript: Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)

Category: Particle/Defect Control and Analysis

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Hitoshi INABA, Tadahiro OHMI, Takanori YOSHIDA, Takao OKADA, "Neutralization of Static Electricity by Soft X-Ray and Vacuum Ultraviolet(UV)-Ray Irradiation" in IEICE TRANSACTIONS on Electronics, vol. E79-C, no. 3, pp. 328-336, March 1996, doi: .
Abstract: A new anti-static technology to neutralize static electricity by high energy photon irradiation has been developed. Ions and electrons required for neutralization are generated by ionization of gas molecules in the vicinity of a charged substance. Gas molecules absorbs photons to become ionized. The wavelength chosen for the irradiation depends on the neutralization atmosphere. Soft X-rays with wavelength over about 1 are effective in air or O₂ gas at pressure higher than several hundreds Torr. Vacuum UV-rays with wavelength below about 1350 is effective in N₂ gas, Ar gas, or reduced pressure ambients. These methods feature excellent neutralization capa-bility. Electrostatic potential can be reduced to 0 V in a very short time without encountering the problems of which conven-tional corona discharge ionizers.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e79-c_3_328/_p

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@ARTICLE{e79-c_3_328,
author={Hitoshi INABA, Tadahiro OHMI, Takanori YOSHIDA, Takao OKADA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Neutralization of Static Electricity by Soft X-Ray and Vacuum Ultraviolet(UV)-Ray Irradiation},
year={1996},
volume={E79-C},
number={3},
pages={328-336},
abstract={A new anti-static technology to neutralize static electricity by high energy photon irradiation has been developed. Ions and electrons required for neutralization are generated by ionization of gas molecules in the vicinity of a charged substance. Gas molecules absorbs photons to become ionized. The wavelength chosen for the irradiation depends on the neutralization atmosphere. Soft X-rays with wavelength over about 1 are effective in air or O₂ gas at pressure higher than several hundreds Torr. Vacuum UV-rays with wavelength below about 1350 is effective in N₂ gas, Ar gas, or reduced pressure ambients. These methods feature excellent neutralization capa-bility. Electrostatic potential can be reduced to 0 V in a very short time without encountering the problems of which conven-tional corona discharge ionizers.},
keywords={},
doi={},
ISSN={},
month={March},}

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TY - JOUR
TI - Neutralization of Static Electricity by Soft X-Ray and Vacuum Ultraviolet(UV)-Ray Irradiation
T2 - IEICE TRANSACTIONS on Electronics
SP - 328
EP - 336
AU - Hitoshi INABA
AU - Tadahiro OHMI
AU - Takanori YOSHIDA
AU - Takao OKADA
PY - 1996
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E79-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 1996
AB - A new anti-static technology to neutralize static electricity by high energy photon irradiation has been developed. Ions and electrons required for neutralization are generated by ionization of gas molecules in the vicinity of a charged substance. Gas molecules absorbs photons to become ionized. The wavelength chosen for the irradiation depends on the neutralization atmosphere. Soft X-rays with wavelength over about 1 are effective in air or O₂ gas at pressure higher than several hundreds Torr. Vacuum UV-rays with wavelength below about 1350 is effective in N₂ gas, Ar gas, or reduced pressure ambients. These methods feature excellent neutralization capa-bility. Electrostatic potential can be reduced to 0 V in a very short time without encountering the problems of which conven-tional corona discharge ionizers.
ER -