Cr2O3 Passivated Gas Tubing System for Specialty Gases
Summary :
We have developed a complete chromium oxide (Cr2O3) passivated gas tubing system by introducing ferritic stainless steel instead of conventional austenitic stainless steel (SUS316L). 100% Cr2O3 passivation film can be formed on electropolished ferritic stainless steel surface because the diffusion coefficient of Cr in ferritic stainless steel is 104 times larger than in austenitic stainless steel. In ferritic stainless steel, moreover, welded bead surface is covered by 100% Cr2O3 pas-sivated film by an introduction of advanced welding technology.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E79-C No.3 pp.385-391
- Publication Date
- 1996/03/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
- Category
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Yasuyuki SHIRAI, Masaki NARAZAKI, Tadahiro OHMI, "Cr2O3 Passivated Gas Tubing System for Specialty Gases" in IEICE TRANSACTIONS on Electronics,
vol. E79-C, no. 3, pp. 385-391, March 1996, doi: .
Abstract: We have developed a complete chromium oxide (Cr2O3) passivated gas tubing system by introducing ferritic stainless steel instead of conventional austenitic stainless steel (SUS316L). 100% Cr2O3 passivation film can be formed on electropolished ferritic stainless steel surface because the diffusion coefficient of Cr in ferritic stainless steel is 104 times larger than in austenitic stainless steel. In ferritic stainless steel, moreover, welded bead surface is covered by 100% Cr2O3 pas-sivated film by an introduction of advanced welding technology.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e79-c_3_385/_p
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@ARTICLE{e79-c_3_385,
author={Yasuyuki SHIRAI, Masaki NARAZAKI, Tadahiro OHMI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Cr2O3 Passivated Gas Tubing System for Specialty Gases},
year={1996},
volume={E79-C},
number={3},
pages={385-391},
abstract={We have developed a complete chromium oxide (Cr2O3) passivated gas tubing system by introducing ferritic stainless steel instead of conventional austenitic stainless steel (SUS316L). 100% Cr2O3 passivation film can be formed on electropolished ferritic stainless steel surface because the diffusion coefficient of Cr in ferritic stainless steel is 104 times larger than in austenitic stainless steel. In ferritic stainless steel, moreover, welded bead surface is covered by 100% Cr2O3 pas-sivated film by an introduction of advanced welding technology.},
keywords={},
doi={},
ISSN={},
month={March},}
Copy
TY - JOUR
TI - Cr2O3 Passivated Gas Tubing System for Specialty Gases
T2 - IEICE TRANSACTIONS on Electronics
SP - 385
EP - 391
AU - Yasuyuki SHIRAI
AU - Masaki NARAZAKI
AU - Tadahiro OHMI
PY - 1996
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E79-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 1996
AB - We have developed a complete chromium oxide (Cr2O3) passivated gas tubing system by introducing ferritic stainless steel instead of conventional austenitic stainless steel (SUS316L). 100% Cr2O3 passivation film can be formed on electropolished ferritic stainless steel surface because the diffusion coefficient of Cr in ferritic stainless steel is 104 times larger than in austenitic stainless steel. In ferritic stainless steel, moreover, welded bead surface is covered by 100% Cr2O3 pas-sivated film by an introduction of advanced welding technology.
ER -
English
