Fabrication and Testing of an Ink-Jet Head Based on Buckling Behavior
Summary :
An ink-jet head using a buckling diaphragm microactuator is described. The microactuator is composed of a silicon substrate, silicon dioxide insulator, nickel heater layer and electro-plated nickel diaphragm. All the edges of the diaphragm are fixed on the substrate and a narrow gap is formed between the diaphragm and the substrate. A nozzle plate is connected to the actuator by an adhesive spacer to get the ink-jet head. An ink chamber is formed by the surfaces of the diaphragm, the nozzle plate, and the side wall of the spacer. When the diaphragm is heated, thermally induced compressive stress causes the diaphragm to buckle rapidly and the diaphragm simultaneously deflects toward the nozzle plate. The deflection raises the pressure in the ink chamber and an ink droplet is then ejected through the nozzle. The head design was carried out using mechanical analysis of a buckling model, and heat transfer simulation. The diaphragm made from nickel is 300 µm diameter and 2 µm-thick. The narrow gap is 0.4 µm. The cathode current density in nickel sulphamate solution used for nickel electro-plating of the diaphragm was 20 mA/cm2. An ink droplet has been ejected with a velocity of 8 m/s while the ink-jet head is operated by heating the diaphragm with a current of 510 mA at 16.6 V for 10 µs at 1.8 kHz.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E80-C No.2 pp.214-220
- Publication Date
- 1997/02/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on Micromachine Technology)
- Category
- Actuator
Authors
Keyword
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Susumu HIRATA, Shingo ABE, Yorishige ISHII, Hirotsugu MATOBA, Tetsuya INUI, "Fabrication and Testing of an Ink-Jet Head Based on Buckling Behavior" in IEICE TRANSACTIONS on Electronics,
vol. E80-C, no. 2, pp. 214-220, February 1997, doi: .
Abstract: An ink-jet head using a buckling diaphragm microactuator is described. The microactuator is composed of a silicon substrate, silicon dioxide insulator, nickel heater layer and electro-plated nickel diaphragm. All the edges of the diaphragm are fixed on the substrate and a narrow gap is formed between the diaphragm and the substrate. A nozzle plate is connected to the actuator by an adhesive spacer to get the ink-jet head. An ink chamber is formed by the surfaces of the diaphragm, the nozzle plate, and the side wall of the spacer. When the diaphragm is heated, thermally induced compressive stress causes the diaphragm to buckle rapidly and the diaphragm simultaneously deflects toward the nozzle plate. The deflection raises the pressure in the ink chamber and an ink droplet is then ejected through the nozzle. The head design was carried out using mechanical analysis of a buckling model, and heat transfer simulation. The diaphragm made from nickel is 300 µm diameter and 2 µm-thick. The narrow gap is 0.4 µm. The cathode current density in nickel sulphamate solution used for nickel electro-plating of the diaphragm was 20 mA/cm2. An ink droplet has been ejected with a velocity of 8 m/s while the ink-jet head is operated by heating the diaphragm with a current of 510 mA at 16.6 V for 10 µs at 1.8 kHz.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e80-c_2_214/_p
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@ARTICLE{e80-c_2_214,
author={Susumu HIRATA, Shingo ABE, Yorishige ISHII, Hirotsugu MATOBA, Tetsuya INUI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Fabrication and Testing of an Ink-Jet Head Based on Buckling Behavior},
year={1997},
volume={E80-C},
number={2},
pages={214-220},
abstract={An ink-jet head using a buckling diaphragm microactuator is described. The microactuator is composed of a silicon substrate, silicon dioxide insulator, nickel heater layer and electro-plated nickel diaphragm. All the edges of the diaphragm are fixed on the substrate and a narrow gap is formed between the diaphragm and the substrate. A nozzle plate is connected to the actuator by an adhesive spacer to get the ink-jet head. An ink chamber is formed by the surfaces of the diaphragm, the nozzle plate, and the side wall of the spacer. When the diaphragm is heated, thermally induced compressive stress causes the diaphragm to buckle rapidly and the diaphragm simultaneously deflects toward the nozzle plate. The deflection raises the pressure in the ink chamber and an ink droplet is then ejected through the nozzle. The head design was carried out using mechanical analysis of a buckling model, and heat transfer simulation. The diaphragm made from nickel is 300 µm diameter and 2 µm-thick. The narrow gap is 0.4 µm. The cathode current density in nickel sulphamate solution used for nickel electro-plating of the diaphragm was 20 mA/cm2. An ink droplet has been ejected with a velocity of 8 m/s while the ink-jet head is operated by heating the diaphragm with a current of 510 mA at 16.6 V for 10 µs at 1.8 kHz.},
keywords={},
doi={},
ISSN={},
month={February},}
Copy
TY - JOUR
TI - Fabrication and Testing of an Ink-Jet Head Based on Buckling Behavior
T2 - IEICE TRANSACTIONS on Electronics
SP - 214
EP - 220
AU - Susumu HIRATA
AU - Shingo ABE
AU - Yorishige ISHII
AU - Hirotsugu MATOBA
AU - Tetsuya INUI
PY - 1997
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E80-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 1997
AB - An ink-jet head using a buckling diaphragm microactuator is described. The microactuator is composed of a silicon substrate, silicon dioxide insulator, nickel heater layer and electro-plated nickel diaphragm. All the edges of the diaphragm are fixed on the substrate and a narrow gap is formed between the diaphragm and the substrate. A nozzle plate is connected to the actuator by an adhesive spacer to get the ink-jet head. An ink chamber is formed by the surfaces of the diaphragm, the nozzle plate, and the side wall of the spacer. When the diaphragm is heated, thermally induced compressive stress causes the diaphragm to buckle rapidly and the diaphragm simultaneously deflects toward the nozzle plate. The deflection raises the pressure in the ink chamber and an ink droplet is then ejected through the nozzle. The head design was carried out using mechanical analysis of a buckling model, and heat transfer simulation. The diaphragm made from nickel is 300 µm diameter and 2 µm-thick. The narrow gap is 0.4 µm. The cathode current density in nickel sulphamate solution used for nickel electro-plating of the diaphragm was 20 mA/cm2. An ink droplet has been ejected with a velocity of 8 m/s while the ink-jet head is operated by heating the diaphragm with a current of 510 mA at 16.6 V for 10 µs at 1.8 kHz.
ER -
English
