Capacitive Pressure Sensor with Center Clamped Diaphragm
Summary :
A new silicon capacitive pressure sensor with center clamped diaphragm is presented. The sensor has a silicon-glass structure and is fabricated by batch-fabrication processes. Since deformed diaphragm has a doughnut-shape, parallel-like displacement is realized and therefore better linearity of 0.7% which is half of the conventional flat diaphragm sensor is obtained. It is clarified both analytically and experimentally that the capacitive pressure sensor with center clamped diaphragm is advantageous in terms of linearity.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E80-C No.2 pp.263-268
- Publication Date
- 1997/02/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on Micromachine Technology)
- Category
- Sensor
Authors
Keyword
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Toshihiko OMI, Kenji HORIBATA, Fumihiko SATO, Masashi TAKEUCHI, "Capacitive Pressure Sensor with Center Clamped Diaphragm" in IEICE TRANSACTIONS on Electronics,
vol. E80-C, no. 2, pp. 263-268, February 1997, doi: .
Abstract: A new silicon capacitive pressure sensor with center clamped diaphragm is presented. The sensor has a silicon-glass structure and is fabricated by batch-fabrication processes. Since deformed diaphragm has a doughnut-shape, parallel-like displacement is realized and therefore better linearity of 0.7% which is half of the conventional flat diaphragm sensor is obtained. It is clarified both analytically and experimentally that the capacitive pressure sensor with center clamped diaphragm is advantageous in terms of linearity.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e80-c_2_263/_p
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@ARTICLE{e80-c_2_263,
author={Toshihiko OMI, Kenji HORIBATA, Fumihiko SATO, Masashi TAKEUCHI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Capacitive Pressure Sensor with Center Clamped Diaphragm},
year={1997},
volume={E80-C},
number={2},
pages={263-268},
abstract={A new silicon capacitive pressure sensor with center clamped diaphragm is presented. The sensor has a silicon-glass structure and is fabricated by batch-fabrication processes. Since deformed diaphragm has a doughnut-shape, parallel-like displacement is realized and therefore better linearity of 0.7% which is half of the conventional flat diaphragm sensor is obtained. It is clarified both analytically and experimentally that the capacitive pressure sensor with center clamped diaphragm is advantageous in terms of linearity.},
keywords={},
doi={},
ISSN={},
month={February},}
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TY - JOUR
TI - Capacitive Pressure Sensor with Center Clamped Diaphragm
T2 - IEICE TRANSACTIONS on Electronics
SP - 263
EP - 268
AU - Toshihiko OMI
AU - Kenji HORIBATA
AU - Fumihiko SATO
AU - Masashi TAKEUCHI
PY - 1997
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E80-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 1997
AB - A new silicon capacitive pressure sensor with center clamped diaphragm is presented. The sensor has a silicon-glass structure and is fabricated by batch-fabrication processes. Since deformed diaphragm has a doughnut-shape, parallel-like displacement is realized and therefore better linearity of 0.7% which is half of the conventional flat diaphragm sensor is obtained. It is clarified both analytically and experimentally that the capacitive pressure sensor with center clamped diaphragm is advantageous in terms of linearity.
ER -
English
