IEICE TRANSACTIONS on Electronics
A Complete Methodology for Electro-Mechanical Characterization of a CMOS Compatible MEMS Technology
Summary :
In this paper we present a complete methodology for efficient electro-mechanical characterization of a CMOS compatible MEMS technology. Using an original test structure, the so-called "U-shape cantilever beam," we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electro-mechanical relations for the design of Microsystems have also been developed.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E82-C No.4 pp.582-588
- Publication Date
- 1999/04/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on Microelectronic Test Structures)
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Laurent LATORRE, Pascal NOUET, "A Complete Methodology for Electro-Mechanical Characterization of a CMOS Compatible MEMS Technology" in IEICE TRANSACTIONS on Electronics,
vol. E82-C, no. 4, pp. 582-588, April 1999, doi: .
Abstract: In this paper we present a complete methodology for efficient electro-mechanical characterization of a CMOS compatible MEMS technology. Using an original test structure, the so-called "U-shape cantilever beam," we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electro-mechanical relations for the design of Microsystems have also been developed.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e82-c_4_582/_p
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@ARTICLE{e82-c_4_582,
author={Laurent LATORRE, Pascal NOUET, },
journal={IEICE TRANSACTIONS on Electronics},
title={A Complete Methodology for Electro-Mechanical Characterization of a CMOS Compatible MEMS Technology},
year={1999},
volume={E82-C},
number={4},
pages={582-588},
abstract={In this paper we present a complete methodology for efficient electro-mechanical characterization of a CMOS compatible MEMS technology. Using an original test structure, the so-called "U-shape cantilever beam," we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electro-mechanical relations for the design of Microsystems have also been developed.},
keywords={},
doi={},
ISSN={},
month={April},}
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TY - JOUR
TI - A Complete Methodology for Electro-Mechanical Characterization of a CMOS Compatible MEMS Technology
T2 - IEICE TRANSACTIONS on Electronics
SP - 582
EP - 588
AU - Laurent LATORRE
AU - Pascal NOUET
PY - 1999
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E82-C
IS - 4
JA - IEICE TRANSACTIONS on Electronics
Y1 - April 1999
AB - In this paper we present a complete methodology for efficient electro-mechanical characterization of a CMOS compatible MEMS technology. Using an original test structure, the so-called "U-shape cantilever beam," we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electro-mechanical relations for the design of Microsystems have also been developed.
ER -
English
