Atomic Scale Simulation of Extended Defects: Monte Carlo Approach
Summary :
This paper reports a Monte Carlo calculation of the bimolecular reaction of arsenic precipitation. As the accuracy of the numerical solution for the coupled rate equations strongly depends on the size of grid spacing, it is necessary to choose adequate number of rate equations in order to understand the behavior of the extended defects. Therefore, we developed a general kinetic Monte Carlo model for the extended defects, which explicitly takes the time evolution of the size density of the extended defects into account. The Monte Carlo calculation exhibits a quantitative agreement with the experimental data for deactivation, and successfully reproduces the rapid deactivation at the beginning phase followed by slow deactivation in the subsequent steps.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E83-C No.8 pp.1253-1258
- Publication Date
- 2000/08/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))
- Category
- Process Modeling and Simulation
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Jaehee LEE, Taeyoung WON, "Atomic Scale Simulation of Extended Defects: Monte Carlo Approach" in IEICE TRANSACTIONS on Electronics,
vol. E83-C, no. 8, pp. 1253-1258, August 2000, doi: .
Abstract: This paper reports a Monte Carlo calculation of the bimolecular reaction of arsenic precipitation. As the accuracy of the numerical solution for the coupled rate equations strongly depends on the size of grid spacing, it is necessary to choose adequate number of rate equations in order to understand the behavior of the extended defects. Therefore, we developed a general kinetic Monte Carlo model for the extended defects, which explicitly takes the time evolution of the size density of the extended defects into account. The Monte Carlo calculation exhibits a quantitative agreement with the experimental data for deactivation, and successfully reproduces the rapid deactivation at the beginning phase followed by slow deactivation in the subsequent steps.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e83-c_8_1253/_p
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@ARTICLE{e83-c_8_1253,
author={Jaehee LEE, Taeyoung WON, },
journal={IEICE TRANSACTIONS on Electronics},
title={Atomic Scale Simulation of Extended Defects: Monte Carlo Approach},
year={2000},
volume={E83-C},
number={8},
pages={1253-1258},
abstract={This paper reports a Monte Carlo calculation of the bimolecular reaction of arsenic precipitation. As the accuracy of the numerical solution for the coupled rate equations strongly depends on the size of grid spacing, it is necessary to choose adequate number of rate equations in order to understand the behavior of the extended defects. Therefore, we developed a general kinetic Monte Carlo model for the extended defects, which explicitly takes the time evolution of the size density of the extended defects into account. The Monte Carlo calculation exhibits a quantitative agreement with the experimental data for deactivation, and successfully reproduces the rapid deactivation at the beginning phase followed by slow deactivation in the subsequent steps.},
keywords={},
doi={},
ISSN={},
month={August},}
Copy
TY - JOUR
TI - Atomic Scale Simulation of Extended Defects: Monte Carlo Approach
T2 - IEICE TRANSACTIONS on Electronics
SP - 1253
EP - 1258
AU - Jaehee LEE
AU - Taeyoung WON
PY - 2000
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E83-C
IS - 8
JA - IEICE TRANSACTIONS on Electronics
Y1 - August 2000
AB - This paper reports a Monte Carlo calculation of the bimolecular reaction of arsenic precipitation. As the accuracy of the numerical solution for the coupled rate equations strongly depends on the size of grid spacing, it is necessary to choose adequate number of rate equations in order to understand the behavior of the extended defects. Therefore, we developed a general kinetic Monte Carlo model for the extended defects, which explicitly takes the time evolution of the size density of the extended defects into account. The Monte Carlo calculation exhibits a quantitative agreement with the experimental data for deactivation, and successfully reproduces the rapid deactivation at the beginning phase followed by slow deactivation in the subsequent steps.
ER -
English
