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This paper reports a Monte Carlo calculation of the bimolecular reaction of arsenic precipitation. As the accuracy of the numerical solution for the coupled rate equations strongly depends on the size of grid spacing, it is necessary to choose adequate number of rate equations in order to understand the behavior of the extended defects. Therefore, we developed a general kinetic Monte Carlo model for the extended defects, which explicitly takes the time evolution of the size density of the extended defects into account. The Monte Carlo calculation exhibits a quantitative agreement with the experimental data for deactivation, and successfully reproduces the rapid deactivation at the beginning phase followed by slow deactivation in the subsequent steps.

- Publication
- IEICE TRANSACTIONS on Electronics Vol.E83-C No.8 pp.1253-1258

- Publication Date
- 2000/08/25

- Publicized

- Online ISSN

- DOI

- Type of Manuscript
- Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))

- Category
- Process Modeling and Simulation

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Jaehee LEE, Taeyoung WON, "Atomic Scale Simulation of Extended Defects: Monte Carlo Approach" in IEICE TRANSACTIONS on Electronics,
vol. E83-C, no. 8, pp. 1253-1258, August 2000, doi: .

Abstract: This paper reports a Monte Carlo calculation of the bimolecular reaction of arsenic precipitation. As the accuracy of the numerical solution for the coupled rate equations strongly depends on the size of grid spacing, it is necessary to choose adequate number of rate equations in order to understand the behavior of the extended defects. Therefore, we developed a general kinetic Monte Carlo model for the extended defects, which explicitly takes the time evolution of the size density of the extended defects into account. The Monte Carlo calculation exhibits a quantitative agreement with the experimental data for deactivation, and successfully reproduces the rapid deactivation at the beginning phase followed by slow deactivation in the subsequent steps.

URL: https://global.ieice.org/en_transactions/electronics/10.1587/e83-c_8_1253/_p

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@ARTICLE{e83-c_8_1253,

author={Jaehee LEE, Taeyoung WON, },

journal={IEICE TRANSACTIONS on Electronics},

title={Atomic Scale Simulation of Extended Defects: Monte Carlo Approach},

year={2000},

volume={E83-C},

number={8},

pages={1253-1258},

abstract={This paper reports a Monte Carlo calculation of the bimolecular reaction of arsenic precipitation. As the accuracy of the numerical solution for the coupled rate equations strongly depends on the size of grid spacing, it is necessary to choose adequate number of rate equations in order to understand the behavior of the extended defects. Therefore, we developed a general kinetic Monte Carlo model for the extended defects, which explicitly takes the time evolution of the size density of the extended defects into account. The Monte Carlo calculation exhibits a quantitative agreement with the experimental data for deactivation, and successfully reproduces the rapid deactivation at the beginning phase followed by slow deactivation in the subsequent steps.},

keywords={},

doi={},

ISSN={},

month={August},}

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TY - JOUR

TI - Atomic Scale Simulation of Extended Defects: Monte Carlo Approach

T2 - IEICE TRANSACTIONS on Electronics

SP - 1253

EP - 1258

AU - Jaehee LEE

AU - Taeyoung WON

PY - 2000

DO -

JO - IEICE TRANSACTIONS on Electronics

SN -

VL - E83-C

IS - 8

JA - IEICE TRANSACTIONS on Electronics

Y1 - August 2000

AB - This paper reports a Monte Carlo calculation of the bimolecular reaction of arsenic precipitation. As the accuracy of the numerical solution for the coupled rate equations strongly depends on the size of grid spacing, it is necessary to choose adequate number of rate equations in order to understand the behavior of the extended defects. Therefore, we developed a general kinetic Monte Carlo model for the extended defects, which explicitly takes the time evolution of the size density of the extended defects into account. The Monte Carlo calculation exhibits a quantitative agreement with the experimental data for deactivation, and successfully reproduces the rapid deactivation at the beginning phase followed by slow deactivation in the subsequent steps.

ER -