Basic Studies of Fiber-Optic MEMS for Telecommunication Using Three Dimensional Micromachining
Summary :
Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micro-machining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E84-C No.12 pp.1785-1791
- Publication Date
- 2001/12/01
- Publicized
- Online ISSN
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- Type of Manuscript
- Special Section PAPER (Special Issue on Integrated Systems with New Concepts)
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Kazuhiro HANE, Minoru SASAKI, JongHyeong SONG, Yohei TAGUCHI, Kosuke MIURA, "Basic Studies of Fiber-Optic MEMS for Telecommunication Using Three Dimensional Micromachining" in IEICE TRANSACTIONS on Electronics,
vol. E84-C, no. 12, pp. 1785-1791, December 2001, doi: .
Abstract: Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micro-machining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e84-c_12_1785/_p
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@ARTICLE{e84-c_12_1785,
author={Kazuhiro HANE, Minoru SASAKI, JongHyeong SONG, Yohei TAGUCHI, Kosuke MIURA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Basic Studies of Fiber-Optic MEMS for Telecommunication Using Three Dimensional Micromachining},
year={2001},
volume={E84-C},
number={12},
pages={1785-1791},
abstract={Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micro-machining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.},
keywords={},
doi={},
ISSN={},
month={December},}
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TY - JOUR
TI - Basic Studies of Fiber-Optic MEMS for Telecommunication Using Three Dimensional Micromachining
T2 - IEICE TRANSACTIONS on Electronics
SP - 1785
EP - 1791
AU - Kazuhiro HANE
AU - Minoru SASAKI
AU - JongHyeong SONG
AU - Yohei TAGUCHI
AU - Kosuke MIURA
PY - 2001
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E84-C
IS - 12
JA - IEICE TRANSACTIONS on Electronics
Y1 - December 2001
AB - Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micro-machining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.
ER -
English
