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Basic Studies of Fiber-Optic MEMS for Telecommunication Using Three Dimensional Micromachining

Kazuhiro HANE, Minoru SASAKI, JongHyeong SONG, Yohei TAGUCHI, Kosuke MIURA

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Summary :

Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micro-machining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.

Publication
IEICE TRANSACTIONS on Electronics Vol.E84-C No.12 pp.1785-1791
Publication Date
2001/12/01
Publicized
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Type of Manuscript
Special Section PAPER (Special Issue on Integrated Systems with New Concepts)
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